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Garrett Standley
at NXP Semiconductors
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 26 March 2008 Paper
Defect reduction using new digital valve dispensing technology
Proceedings Volume 6923, 69233T (2008) https://doi.org/10.1117/12.768951
KEYWORDS: Semiconducting wafers, Deep ultraviolet, Error analysis, Control systems, Optical lithography, Photoresist processing, Signal detection, Telecommunications, Data communications, Silicon
Proceedings Article | 29 March 2006 Paper
Advanced photoresist dispense valve control technology
Garrett Standley, Brian Kidd, Kevin Hartman
Proceedings Volume 6153, 61534O (2006) https://doi.org/10.1117/12.656628
KEYWORDS: Error analysis, Semiconducting wafers, Deep ultraviolet, Particles, Control systems, Silicon, Photoresist materials, Manufacturing, Telecommunications, Data communications
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