Dr. Gary E. Sommargren Profile

Dr. Gary E. Sommargren

at Lawrence Livermore National Lab

SPIE Involvement:

Author

Publications (20)

Proceedings Article | 15 September 2005 Paper

Paper

Extreme adaptive optics testbed: high contrast measurements with a MEMS deformable mirror

Julia Evans, Katie Morzinski, Layra Reza, Scott Severson, Lisa Poyneer, Bruce Macintosh, Daren Dillon, Gary Sommargren, David Palmer, Don Gavel, Scot Olivier

Proceedings Volume 5905, 59050Y (2005) https://doi.org/10.1117/12.619140

KEYWORDS: Actuators, Wavefronts, Microelectromechanical systems, Adaptive optics, Deformable mirrors, Diffraction, Optical testing, Spatial frequencies, Point spread functions, Imaging systems

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Proceedings Article | 8 September 2005 Paper

Paper

Ultra-high-accuracy optical testing: creating diffraction-limited short-wavelength optical systems

Kenneth Goldberg, Patrick Naulleau, Senajith Rekawa, Paul Denham, J. Liddle, Eric Gullikson, Keith Jackson, Erik Anderson, John Taylor, Gary Sommargren, Henry Chapman, Donald Phillion, Michael Johnson, Anton Barty, Regina Soufli, Eberhard Spiller, Christopher Walton, Sasa Bajt

Proceedings Volume 5900, 59000G (2005) https://doi.org/10.1117/12.618066

KEYWORDS: Extreme ultraviolet, Optical testing, Interferometry, EUV optics, X-ray optics, X-rays, Lenses, Light sources, Astronomical imaging, X-ray astronomy

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Proceedings Article | 18 August 2005 Paper

Paper

Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems

Donald Phillion, Gary Sommargren, Michael Johnson, Todd Decker, John Taylor, Yoshio Gomei, Osamu Kakuchi, Seiji Takeuchi

Proceedings Volume 5869, 58690R (2005) https://doi.org/10.1117/12.623187

KEYWORDS: Wavefronts, Interferometers, Optical testing, Calibration, Mirrors, Spherical lenses, Interferometry, Phase interferometry, Extreme ultraviolet lithography, CCD cameras

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Proceedings Article | 18 August 2005 Paper

Paper

Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems

Michael Johnson, Donald Phillion, Gary Sommargren, Todd Decker, John Taylor, Yoshio Gomei, Osamu Kakuchi, Seiji Takeuchi

Proceedings Volume 5869, 58690P (2005) https://doi.org/10.1117/12.623185

KEYWORDS: Wavefronts, Mirrors, Extreme ultraviolet lithography, Calibration, Silicon, Metrology, Charge-coupled devices, Polarization, Cameras, Monochromatic aberrations

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Proceedings Article | 25 October 2004 Paper

Paper

eXtreme Adaptive Optics Planet Imager: overview and status

Bruce Macintosh, Brian Bauman, Julia Wilhelmsen Evans, James Graham, Christopher Lockwood, Lisa Poyneer, Daren Dillon, Don Gavel, Joseph Green, James Lloyd, Russell Makidon, Scot Olivier, Dave Palmer, Marshall Perrin, Scott Severson, Andrew Sheinis, Anand Sivaramakrishnan, Gary Sommargren, Remi Soummer, Mitchell Troy, J. Kent Wallace, Edward Wishnow

Proceedings Volume 5490, (2004) https://doi.org/10.1117/12.552188

KEYWORDS: Adaptive optics, Point spread functions, Wavefronts, Planets, Coronagraphy, Wavefront sensors, Telescopes, Stars, Imaging systems, Calibration

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Proceedings Article | 25 October 2004 Paper

Paper

Extreme adaptive optics testbed: results and future work

Julia Wilhelmsen Evans, Gary Sommargren, Lisa Poyneer, Bruce Macintosh, Scott Severson, Daren Dillon, Andrew Sheinis, Dave Palmer, N. Jeremy Kasdin, Scot Olivier

Proceedings Volume 5490, (2004) https://doi.org/10.1117/12.551762

KEYWORDS: Wavefronts, Adaptive optics, Microelectromechanical systems, Diffraction, Optical testing, Point spread functions, Control systems, Phase shifting, Interferometers, Deformable mirrors

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Proceedings Article | 20 May 2004 Paper

Paper

Status of EUV micro-exposure capabilities at the ALS using the 0.3-NA MET optic

Patrick Naulleau, Kenneth Goldberg, Erik Anderson, Kevin Bradley, Rene Delano, Paul Denham, Bob Gunion, Bruce Harteneck, Brian Hoef, Hanjing Huang, Keith Jackson, Gideon Jones, Drew Kemp, James Liddle, Ron Oort, Al Rawlins, Senajith Rekawa, Farhad Salmassi, Ron Tackaberry, Carl Chung, Layton Hale, Don Phillion, Gary Sommargren, John Taylor

Proceedings Volume 5374, (2004) https://doi.org/10.1117/12.556538

KEYWORDS: Reticles, Semiconducting wafers, Sensors, Fiber optic illuminators, Printing, Extreme ultraviolet lithography, Metrology, Wafer-level optics, Scanners, Lithography

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Proceedings Article | 19 November 2003 Paper

Paper

Extreme adaptive optics planet imager: XAOPI

Bruce Macintosh, James Graham, Lisa Poyneer, Gary Sommargren, Julia Wilhelmsen, Don Gavel, Steve Jones, Paul Kalas, James Lloyd, Russ Makidon, Scot Olivier, Dave Palmer, Jennifer Patience, Marshall Perrin, Scott Severson, Andrew Sheinis, Anand Sivaramakrishnan, Mitch Troy, J. Wallace

Proceedings Volume 5170, (2003) https://doi.org/10.1117/12.506836

KEYWORDS: Wavefronts, Adaptive optics, Wavefront sensors, Planets, Imaging systems, Coronagraphy, Point spread functions, Stars, Telescopes, Mirrors

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Proceedings Article | 16 June 2003 Paper

Paper

System and process learning in a full-field high-power EUVL alpha tool

William Ballard, Daniel Tichenor, Donna O'Connell, Luis Bernardez, Robert Lafon, Richard Anderson, Alvin Leung, Kenneth Williams, Steven Haney, Yon Perras, Karen Jefferson, Therese Porter, Daniel Knight, Pamela Barr, James Van de Vreugde, Richard Campiotti, Mark Zimmerman, Terry Johnson, Leonard Klebanoff, Philip Grunow, Samuel Graham, Dean Buchenauer, William Replogle, Tony Smith, John Wronosky, Joel Darnold, Kenneth Blaedel, Henry Chapman, John Taylor, Layton Hale, Gary Sommargren, Eric Gullikson, Patrick Naulleau, Kenneth Goldberg, Sang Hun Lee, Harry Shields, Randall St. Pierre, Samuel Ponti

Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.482791

KEYWORDS: Semiconducting wafers, Reticles, Extreme ultraviolet, Sensors, Extreme ultraviolet lithography, Lithography, Projection systems, Xenon, EUV optics, Fiber optic illuminators

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Proceedings Article | 11 March 2003 Paper

Paper

Diffraction-limited astronomical x-ray imaging and x-ray interferometry using normal-incidence multilayer optics

David Windt, Steven Kahn, Gary Sommargren

Proceedings Volume 4851, (2003) https://doi.org/10.1117/12.461288

KEYWORDS: X-rays, Multilayers, Mirrors, X-ray telescopes, X-ray imaging, Spatial resolution, X-ray astronomy, Reflectivity, Interferometers, Astronomy

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Proceedings Article | 24 February 2003 Paper

Paper

Requirements for an optical 8-m space telescope with a MEMs deformable mirror to detect Earth-like planets around nearby stars

Holland Ford, Mark Clampin, Garth Illingworth, John Krist, Scot Olivier, Larry Petro, Gary Sommagren

Proceedings Volume 4854, (2003) https://doi.org/10.1117/12.460052

KEYWORDS: Space telescopes, Planets, Stars, Mirrors, Wavefronts, Telescopes, Deformable mirrors, Coronagraphy, Device simulation, Polishing

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Proceedings Article | 1 July 2002 Paper

Paper

Performance upgrades in the EUV engineering test stand

Daniel Tichenor, William Replogle, Sang Hun Lee, William Ballard, Alvin Leung, Glenn Kubiak, Leonard Klebanoff, Samual Graham, John Goldsmith, Karen Jefferson, John Wronosky, Tony Smith, Terry Johnson, Harry Shields, Layton Hale, Henry Chapman, John Taylor, Donald Sweeney, James Folta, Gary Sommargren, Kenneth Goldberg, Patrick Naulleau, David Attwood, Eric Gullikson

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472328

KEYWORDS: Semiconducting wafers, Sensors, Extreme ultraviolet, Reticles, Projection systems, Extreme ultraviolet lithography, Printing, Lithography, Fiber optic illuminators, Wavefronts

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Proceedings Article | 1 July 2002 Paper

Paper

100-picometer interferometry for EUVL

Gary Sommargren, D. Phillion, Michael Johnson, Nhan Nguyen, Anton Barty, Franklyn Snell, Daren Dillon, Lloyd Bradsher

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472305

KEYWORDS: Extreme ultraviolet lithography, Interferometry, Diffraction, Mirrors, Lithography, Cameras, Aspheric optics, Visible radiation, Phase shifting, CCD cameras

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Proceedings Article | 20 December 2001 Paper

Paper

Initial results from the EUV engineering test stand

Daniel Tichenor, Avijit Ray-Chaudhuri, Sang Hun Lee, Henry Chapman, William Replogle, Kurt Berger, Richard Stulen, Glenn Kubiak, Leonard Klebanoff, John Wronosky, Donna O'Connell, Alvin Leung, Karen Jefferson, William Ballard, Layton Hale, Kenneth Blaedel, John Taylor, James Folta, Eberhard Spiller, Regina Soufli, Gary Sommargren, Donald Sweeney, Patrick Naulleau, Kenneth Goldberg, Eric Gullikson, Jeffrey Bokor, David Attwood, Uwe Mickan, Ralph Hanzen, Eric Panning, Pei-yang Yan, John Bjorkholm, Charles Gwyn

Proceedings Volume 4506, (2001) https://doi.org/10.1117/12.450953

KEYWORDS: Extreme ultraviolet, Reticles, Projection systems, Semiconducting wafers, Lithography, Monochromatic aberrations, Extreme ultraviolet lithography, Plasma, Sensors, Mirrors

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Proceedings Article | 20 August 2001 Paper

Paper

System integration and performance of the EUV engineering test stand

Daniel Tichenor, Avijit Ray-Chaudhuri, William Replogle, Richard Stulen, Glenn Kubiak, Paul Rockett, Leonard Klebanoff, Karen Jefferson, Alvin Leung, John Wronosky, Layton Hale, Henry Chapman, John Taylor, James Folta, Claude Montcalm, Regina Soufli, Eberhard Spiller, Kenneth Blaedel, Gary Sommargren, Donald Sweeney, Patrick Naulleau, Kenneth Goldberg, Eric Gullikson, Jeffrey Bokor, Phillip Batson, David Attwood, Keith Jackson, Scott Hector, Charles Gwyn, Pei-yang Yan

Proceedings Volume 4343, (2001) https://doi.org/10.1117/12.436665

KEYWORDS: Extreme ultraviolet, Semiconducting wafers, Reticles, Projection systems, Sensors, Xenon, Mirrors, Optical alignment, Fiber optic illuminators, Multilayers

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Proceedings Article | 20 July 2000 Paper

Paper

Primary mirror segment fabrication for CELT

Terry Mast, Jerry Nelson, Gary Sommargren

Proceedings Volume 4003, (2000) https://doi.org/10.1117/12.391538

KEYWORDS: Mirrors, Wavefronts, Polishing, Telescopes, Computer generated holography, Monochromatic aberrations, Image segmentation, Spherical lenses, Surface finishing, Aspheric lenses

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Proceedings Article | 5 June 1998 Paper

Paper

Minimizing mapping-induced OPD errors when testing aspheric mirrors

Russell Hudyma, Gary Sommargren

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309561

KEYWORDS: Imaging systems, Aspheric lenses, Wavefronts, Mirrors, Cameras, Error analysis, Extreme ultraviolet, Geometrical optics, Aspheric optics, Optical spheres

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Proceedings Article | 5 June 1998 Paper

Paper

Fabrication and testing of optics for EUV projection lithography

John Taylor, Gary Sommargren, Donald Sweeney, Russell Hudyma

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309619

KEYWORDS: Extreme ultraviolet lithography, Aspheric lenses, Reflectivity, Mirrors, Surface finishing, Scattering, Spherical lenses, Optical fabrication, Extreme ultraviolet, Wavefronts

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Proceedings Article | 5 September 1997 Paper

Paper

Electrostatic comb drive for vertical actuation

Abraham Lee, Charles McConaghy, Peter A. Krulevitch, Eugene Campbell, Gary Sommargren, Jimmy Trevino

Proceedings Volume 3224, (1997) https://doi.org/10.1117/12.284506

KEYWORDS: Microactuators, Interferometry, Microsensors, Phase shifting, Capacitors, In situ remote sensing, Sensing systems, Motion controllers, Control systems, Distance measurement

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Proceedings Article | 19 May 1995 Paper

Paper

At-wavelength testing of optics for EUV

Kenneth Goldberg, H. Beguiristain, Jeffrey Bokor, Hector Medecki, Keith Jackson, David Attwood, Gary Sommargren, James Spallas, Ralph Hostetler

Proceedings Volume 2437, (1995) https://doi.org/10.1117/12.209172

KEYWORDS: Zone plates, Wavefronts, Extreme ultraviolet, Optical testing, EUV optics, Interferometers, Diffraction, Optical components, Fringe analysis, Photomasks

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Showing 5 of 20 publications

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