Dr. Gaurav K. Agrawal Profile

Dr. Gaurav K. Agrawal

Member of Technical Staff at GlobalFoundries

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Publications (2)

Proceedings Article | 2 April 2014 Paper

Lithography run-to-run control in high mix manufacturing environment with a dynamic state estimation approach

Mark Yelverton, Gaurav Agrawal

Proceedings Volume 9050, 90500Q (2014) https://doi.org/10.1117/12.2046331

KEYWORDS: Lithography, Control systems, Semiconducting wafers, Metrology, Process control, Manufacturing, Databases, Algorithm development, Statistical analysis, Semiconductor manufacturing

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Proceedings Article | 10 April 2013 Paper

Implementation of hybrid metrology at HVM fab for 20nm and beyond

Alok Vaid, Lokesh Subramany, Givantha Iddawela, Carl Ford, John Allgair, Gaurav Agrawal, John Taylor, Carsten Hartig, Byung Cheol (Charles) Kang, Cornel Bozdog, Matthew Sendelbach, Paul Isbester, Limor Issascharoff

Proceedings Volume 8681, 868103 (2013) https://doi.org/10.1117/12.2012339

KEYWORDS: Metrology, Semiconducting wafers, Critical dimension metrology, Transmission electron microscopy, Etching, Process control, Reactive ion etching, Data modeling, High volume manufacturing

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