Dr. Gavin C. Rider Profile

Dr. Gavin C. Rider

Vice President/Technology & Development

SPIE Involvement:

Author

Publications (7)

SPIE Journal Paper | 5 August 2022 Open Access

Field-induced and photon-induced CD degradation in transmission reticles: a comparative review

Gavin Rider

JM3, Vol. 21, Issue 03, 030901, (August 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.3.030901

KEYWORDS: Reticles, Chromium, Chemical species, Glasses, Diffusion, Critical dimension metrology, Lithography, Oxides, Air contamination, Humidity

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SPIE Journal Paper | 27 April 2018 Open Access

Current understanding of the electrostatic risk to reticles used in microelectronics and similar manufacturing processes

Gavin Rider

JM3, Vol. 17, Issue 02, 020901, (April 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.2.020901

KEYWORDS: Reticles, Semiconductors, Sensors, Microelectronics, Manufacturing, Air contamination, Semiconductor manufacturing, Metals, Semiconducting wafers, Electric field sensors

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SPIE Journal Paper | 5 April 2016

Electrostatic risk to reticles in the nanolithography era

Gavin Rider

JM3, Vol. 15, Issue 02, 023501, (April 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.2.023501

KEYWORDS: Reticles, Nanolithography, Semiconductors, Metals, Sensors, Dielectrics, Quartz, Semiconductor manufacturing, Ionization, Electronic components

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Proceedings Article | 8 March 2016 Paper

Electrostatic risks to reticles and damage prevention methodology

Gavin Rider

Proceedings Volume 9778, 97782S (2016) https://doi.org/10.1117/12.2218360

KEYWORDS: Reticles, Semiconductors, Electronic components, Sensors, Ionization, Standards development, Glasses, Electric field sensors, Semiconductor manufacturing, Manufacturing

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