Dr. Geert Vandenberghe
Director at imec
SPIE Involvement:
Conference Program Committee | Author
Publications (126)

Proceedings Article | 13 October 2020 Presentation + Paper
Proc. SPIE. 11517, Extreme Ultraviolet Lithography 2020
KEYWORDS: Lithography, Electron beam lithography, Polymers, Printing, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Stochastic processes, Photoresist developing

Proceedings Article | 30 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Optical lithography, Ultraviolet radiation, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist processing, Stochastic processes, Absorption

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Optical lithography, Photoresist materials, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Stochastic processes, Photoresist developing

Proceedings Article | 26 September 2019 Presentation + Paper
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Lithography, Electron beam lithography, Polymers, Photoresist materials, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Line edge roughness, Semiconducting wafers, Photoresist developing

Proceedings Article | 9 August 2019 Presentation + Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Optical lithography, Metals, Printing, Photoresist materials, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Double patterning technology, Nanoimprint lithography

Showing 5 of 126 publications
Conference Committee Involvement (21)
Optical Lithography XXXIV
23 February 2021 | San Jose, California, United States
Optical Microlithography XXXIII
25 February 2020 | San Jose, California, United States
Optical Microlithography XXXII
26 February 2019 | San Jose, California, United States
Optical Microlithography XXXI
27 February 2018 | San Jose, California, United States
Optical Microlithography XXX
28 February 2017 | San Jose, California, United States
Showing 5 of 21 Conference Committees
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