Geerten F. I. J. Kramer
at TNO Science and Industry
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 2 March 2020 Paper
Proc. SPIE. 11272, Free-Space Laser Communications XXXII
KEYWORDS: Diffraction, Telescopes, Modulation, Satellites, Multiplexing, Satellite communications, Dense wavelength division multiplexing, Multiplexers, Diffraction gratings

Proceedings Article | 8 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Lithography, Metrology, Interferometers, Sensors, Image resolution, Nondestructive evaluation, Atomic force microscopy, Distance measurement, High dynamic range imaging, Atomic force microscope, Optical alignment, Scanning probe microscopy, Semiconducting wafers, Overlay metrology

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Semiconductors, Metrology, Inspection, Head, Photomasks, Scanning probe microscopy, Motion measurement, Semiconducting wafers, Scanning probe microscopes, Defect inspection

Proceedings Article | 22 August 2009 Paper
Proc. SPIE. 7426, Optical Manufacturing and Testing VIII
KEYWORDS: Photovoltaics, Spindles, Electronics, Metrology, Calibration, Control systems, Freeform optics, Motion measurement, Optics manufacturing, Prototyping

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