Dr. Geng Han
Advisory Engineer at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 17 April 2020 Presentation + Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Logic, Optical lithography, Data modeling, Deep ultraviolet, Photomasks, Optical proximity correction, SRAF, Semiconducting wafers, Optics manufacturing, Yield improvement

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Logic, Optical lithography, Metals, Manufacturing, Reliability, Electronic design automation, New and emerging technologies

Proceedings Article | 20 March 2018 Presentation + Paper
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Etching, Line edge roughness, Photoresist processing, 193nm lithography

Proceedings Article | 24 March 2017 Presentation + Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Multilayers, Reticles, Opacity, Silicon, Coating, Reflectivity, Scanning electron microscopy, Pellicles, Bridges, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, Molybdenum, Semiconducting wafers

Proceedings Article | 18 March 2016 Paper
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Oxides, Lithography, Optical lithography, Etching, Ions, Extreme ultraviolet, Extreme ultraviolet lithography, Neodymium

Showing 5 of 19 publications
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