Dr. Georg Aigeldinger Profile

Dr. Georg Aigeldinger

Dir of Process Engg at KYOCERA SLD Laser Inc

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Publications (6)

Proceedings Article | 20 April 2017 Presentation

Advances in semipolar InGaN laser diodes (Conference Presentation)

Mel McLaurin, James Raring, Christiane Poblenz, Paul Rudy, Georg Aigeldinger, Eric Goutain, Hua Huang

Proc. SPIE. 10123, Novel In-Plane Semiconductor Lasers XVI

KEYWORDS: Light sources, Semiconductor lasers, Gallium nitride, Indium gallium nitride, Current controlled current source

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Proceedings Article | 15 January 2003 Paper

Sacrificial layer for the fabrication of electroformed cantilevered LIGA microparts

Alfredo Morales, Georg Aigeldinger, Michelle Bankert, Linda Domeier, John Hachman, Cheryl Hauck, Patrick Keifer, Karen Krafcik, Dorrance McLean, Peter Yang

Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII

KEYWORDS: Polishing, Titanium, Polymethylmethacrylate, Metals, Glasses, X-rays, Nickel, Silver, Photomasks, Optical alignment

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Proceedings Article | 15 January 2003 Paper

SU-8-based deep x-ray lithography/LIGA

Linke Jian, Yohannes Desta, Jost Goettert, Martin Bednarzik, Bernd Loechel, Yoonyoung Jin, Georg Aigeldinger, Varshni Singh, Gisela Ahrens, Gabi Gruetzner, Ralf Ruhmann, Reinhard Degen

Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII

KEYWORDS: Microelectromechanical systems, Lithography, Polymethylmethacrylate, Ultraviolet radiation, X-rays, Nickel, Photoresist processing, Electroplating, X-ray lithography, 3D microstructuring

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Proceedings Article | 28 September 2001 Paper

Stacked ultradeep x-ray lithography exposures: preliminary results

Georg Aigeldinger, Yohannes Desta, Jost Goettert, Franz Pantenburg

Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII

KEYWORDS: Optical lithography, Polymethylmethacrylate, Scanners, X-rays, Surface roughness, Scanning electron microscopy, Photomasks, Beryllium, X-ray lithography, Temperature metrology

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Proceedings Article | 11 August 2000 Paper

Fabrication of graphite masks for deep and ultradeep x-ray lithography

Yohannes Desta, Georg Aigeldinger, Kevin Zanca, Philip Coane, Jost Goettert, Michael Murphy

Proc. SPIE. 4175, Materials and Device Characterization in Micromachining III

KEYWORDS: Gold, Titanium, Optical lithography, Polymethylmethacrylate, X-rays, Nickel, Silicon, Photomasks, Photoresist processing, X-ray lithography

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Proceedings Article | 10 April 2000 Paper

Preliminary results at the ultradeep x-ray lithography beamline at CAMD

Georg Aigeldinger, Philip Coane, Benjamin Craft, Jost Goettert, Sam Ledger, Zhong Ling, Harish Manohara, Louis Rupp

Proc. SPIE. 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS

KEYWORDS: Gold, Optical filters, Polymethylmethacrylate, Teeth, X-rays, Scanning electron microscopy, Photomasks, Microfabrication, Beryllium, X-ray lithography

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Showing 5 of 6 publications

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