Dr. Georgeta Masson Profile

Dr. Georgeta Masson

at SpectraWatt Inc

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Publications (3)

Proceedings Article | 23 March 2010 Paper

Scissionable polymer resists for extreme ultraviolet lithography

Yoichi Ogata, Georgeta Masson, Yoshi Hishiro, James Blackwell

Proceedings Volume 7636, 763634 (2010) https://doi.org/10.1117/12.847320

KEYWORDS: Polymers, Extreme ultraviolet lithography, Polymerization, Lithography, Photoresist materials, Electron beam lithography, Thin films, Magnesium, Temperature metrology, Extreme ultraviolet

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Proceedings Article | 23 March 2010 Paper

Cobalt-containing polymers as patterning assist layers in extreme ultraviolet lithography

Georgeta Masson

Proceedings Volume 7636, 763631 (2010) https://doi.org/10.1117/12.846634

KEYWORDS: Polymers, Extreme ultraviolet lithography, Cobalt, Optical lithography, Lithography, Extreme ultraviolet, Scanning electron microscopy, Line width roughness, Silicon, Metals

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Proceedings Article | 1 April 2009 Paper

Double-exposure materials for pitch division with 193nm lithography: requirements, results

Robert Bristol, David Shykind, Sungwon Kim, Yan Borodovsky, Evan Schwartz, Courtney Turner, Georgeta Masson, Ke Min, Katherine Esswein, James Blackwell, Nikolay Suetin

Proceedings Volume 7273, 727307 (2009) https://doi.org/10.1117/12.814352

KEYWORDS: Optical lithography, Molecules, 193nm lithography, Lithography, Absorption, Near ultraviolet, Semiconducting wafers, Absorbance, Xenon, Manufacturing

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