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Gerry Hamdana
at Technische Univ Braunschweig
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Publications (3)
Proceedings Article | 2 June 2017 Paper
Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection
Proceedings Volume 10246, 102460K (2017) https://doi.org/10.1117/12.2266084
KEYWORDS: Wheatstone bridges, Resonators, Device simulation, Nanoparticles, Actuators, Silicon, Sensors, Phase measurement, Signal processing, Design for manufacturability, Manufacturing, Micromachining
Proceedings Article | 30 May 2017 Paper
Large-area fabrication of silicon nanostructures by templated nanoparticle arrays
Gerry Hamdana, Maik Bertke, Tobias Südkamp, Hartmut Bracht, Hutomo Suryo Wasisto, Erwin Peiner
Proceedings Volume 10248, 1024808 (2017) https://doi.org/10.1117/12.2264995
KEYWORDS: Nanoparticles, Plasma, Nanolithography, Silicon, Nanostructures, Nanofabrication, Particles, Cryogenics, Dry etching, Etching, Photomasks, Nanowires, Lithography, Surface properties, Modulation
SPIE Journal Paper | 27 May 2016 Open Access
Double-meander spring silicon piezoresistive sensors as microforce calibration standards
Gerry Hamdana, Hutomo Suryo Wasisto, Lutz Doering , Chunlei Yan, Lei Zhou, Uwe Brand, Erwin Peiner
OE, Vol. 55, Issue 09, 091409, (May 2016) https://doi.org/10.1117/12.10.1117/1.OE.55.9.091409
KEYWORDS: Sensors, Silicon, Calibration, Sensor calibration, Piezoresistive sensors, Finite element methods, Etching, 3D modeling, Resistors, Optical engineering
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