To meet the needs of high end gas sensing applications, new materials in suitable device designs are required that can challenge the state-of-the-art, especially concerning affinity towards target compounds within a complex background. Due to their high specific surface area and tailorable pore interiors, metal-organic frameworks (MOFs) serve as promising candidates to function as active coatings in next-generation sensors. However, studies on their integration in optoelectronic devices are rare due to the lack of suitable deposition methods. In this work, photonic crystal sensors functionalized with MOF thin films, are fabricated through a cleanroom-compatible process. The devices are capable of detecting low concentrations of volatile organic compounds, and thus, enable new avenues towards scalable fabrication and integration of miniature MOF-based gas sensor arrays.
Metal-organic frameworks (MOFs) are promising materials for next-generation gas sensing technologies. The implementation of MOFs into scalable gas sensor designs is, however, challenging due to high demands on the MOF film quality. Here, we report the highly sensitive detection of volatile organic compounds by transducing the gas adsorption in MOF thin films, prepared by chemical vapor deposition (MOF-CVD), into surface plasmon polariton shifts. Resonances as sharp as 14 nm, record-breaking shifts larger than 150 nm upon methanol uptake, and a limit of detection below 1 ppm are shown. These findings demonstrate the potential of MOF-CVD thin films for future gas sensing concepts.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.