Gregg T. Borek
Vice President Microoptics at JENOPTIK Optical Systems LLC
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 15 April 2008 Paper
Proc. SPIE. 6940, Infrared Technology and Applications XXXIV
KEYWORDS: Wafer-level optics, Chalcogenide glass, Diffraction, Optical lithography, Etching, Gallium arsenide, Infrared radiation, Plasma etching, Semiconducting wafers, Optics manufacturing

Proceedings Article | 6 February 2008 Paper
Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
KEYWORDS: Microlens array, Etching, Ions, Calcium, Photoresist materials, Diffusers, Photomasks, Semiconducting wafers, Optics manufacturing, Binary data

Proceedings Article | 7 March 2007 Paper
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Optical components, Lithography, Electron beam lithography, Optical lithography, Manufacturing, Micro optics, Photomasks, Chemical elements, Optics manufacturing, Near field optics

Proceedings Article | 18 May 2005 Paper
Proc. SPIE. 5786, Window and Dome Technologies and Materials IX
KEYWORDS: Antireflective coatings, Etching, Gallium arsenide, Reflectivity, Atomic force microscopy, Photoresist materials, Transmittance, Thin film coatings, Semiconducting wafers, Photoresist developing

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5720, Micromachining Technology for Micro-Optics and Nano-Optics III
KEYWORDS: Etching, Glasses, Gallium arsenide, Photoresist materials, Gallium nitride, Photomasks, Plasma etching, Silicon carbide, Semiconducting wafers, Plasma

Showing 5 of 10 publications
Conference Committee Involvement (7)
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
25 January 2010 | San Francisco, California, United States
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
26 January 2009 | San Jose, California, United States
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
21 January 2008 | San Jose, California, United States
Micromachining Technology for Micro-optics and Nano-optics V
23 January 2007 | San Jose, California, United States
Micromachining Technology for Micro-Optics and Nano-Optics IV
23 January 2006 | San Jose, California, United States
Showing 5 of 7 Conference Committees
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