This paper presents a novel piezodriven X-Y stage utilizing flexure hinges. Levers of high amplifying rate were adopted
to magnify the output displacement of the piezoelectric actuator and a complex parallel four-bar mechanism was used to
guide the mobile platform. In order to describe the static and dynamic behaviour of the stage, an analytical model was
built and a series of formulae were deduced. Based on mathematical analysis, the configuration of the stage was
optimized. Then Finite Element Analysis was applied to analyze travel ranges, natural frequencies and stress distribution.
The simulation computation results demonstrate that the stage could reach a motion range of 200mby 200m and has a
first order natural frequency of 265 Hertz, which is of good concordance with the theoretical estimate. Now a prototype
is being fabricated.
This paper extends the modeling of the effect of fringing field, proposed in our recent work, to more generic devices:
electrostatic parallel-plate actuators with deformations. Though these devices can be model as two parallel capacitors with
a variable factor depending on the displacement, it is difficult to determine the analytical expression of such a function.
It is shown that, like the effect of fringing field, the modeling error of the effective actuator due to deformations can
be compensated by introducing a variable serial capacitor. When a suitable robust control is used, the full knowledge
of the introduced serial capacitor is not required, but merely its boundaries of variation. Based on this model, a robust
control scheme is constructed using the theory of input-to-state stability (ISS) and backstepping state feedback design.
This method allows loosening the stringent requirements on modeling accuracy without compromising the performance.
The stability and the performance of the system using this control scheme are demonstrated through both stability analysis
and numerical simulation.
Conference Committee Involvement (1)
Optomechatronic Systems Control IV
20 November 2008 | San Diego, California, United States
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