Dr. Guido Salmaso
at ASML Netherlands BV
SPIE Involvement:
Publications (6)

Proceedings Article | 27 June 2019 Paper
Proc. SPIE. 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Reticles, Reflection, Scanners, Particles, Reflectivity, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 31 August 2009 Paper
Proc. SPIE. 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV
KEYWORDS: Mirrors, Multilayers, Astronomy, X-ray optics, Nickel, Coating, Manufacturing, Reflectivity, Hard x-rays, Optics manufacturing

Proceedings Article | 30 April 2009 Paper
Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space
KEYWORDS: Telescopes, Mirrors, Multilayers, Silicon, Manufacturing, Reflectivity, Space telescopes, Reflector telescopes, Hard x-rays, Plasma

Proceedings Article | 18 March 2009 Paper
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Mirrors, Optical design, Reflectivity, Solids, Extreme ultraviolet, Integrated optics, Extreme ultraviolet lithography, Optics manufacturing, Ruthenium, EUV optics

Proceedings Article | 4 February 2004 Paper
Proc. SPIE. 5171, Telescopes and Instrumentation for Solar Astrophysics
KEYWORDS: Gold, Thermography, Telescopes, Mirrors, Sun, Spectroscopy, Silicon, Optical coatings, Reflectivity, Extreme ultraviolet

Showing 5 of 6 publications
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