Dr. Guillaume Freychet
Beamline Scientist at Brokhaven National Lab
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Oxides, Optical lithography, Etching, Metals, Silicon, Resistance, Extreme ultraviolet, Plasma etching, Nanolithography, Scanning transmission electron microscopy

Proceedings Article | 24 March 2020 Presentation
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV

Proceedings Article | 24 March 2020 Presentation
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI

Proceedings Article | 16 October 2019 Presentation
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Carbon, Lithography, Photodetectors, Scattering, X-rays, Chemistry, Extreme ultraviolet, Line edge roughness, X-ray imaging, Grazing incidence

SPIE Journal Paper | 3 May 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Scattering, X-rays, 3D image reconstruction, Extreme ultraviolet, X-ray imaging, Extreme ultraviolet lithography, 3D image processing, Modulation, Carbon, Image enhancement

Showing 5 of 13 publications
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