Dr. Hassan Ait-Haddou Profile

Dr. Hassan Ait-Haddou

Distinguished R&D Fellow at Pall Corp

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Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation

Novel functionalized membrane approaches to metal contamination control in advanced lithography filtration

Hassan Ait-Haddou, James Belmont, Frank Onyemauwa, Takehito Mizuno, Atsushi Hattori, Toru Umeda, Yiren Zhang, Timothy McKeon, Rajan Beera

Proceedings Volume 11612, 116120Z (2021) https://doi.org/10.1117/12.2584752

KEYWORDS: Metals, Lithography, Contamination control, Chemistry, Yield improvement, Semiconductors, Semiconducting wafers, Photoresist materials, Oxides, Nanoparticles

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