Mr. Haidong Liang Profile

Haidong Liang

at National Univ of Singapore

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 14 March 2013 Paper

Ion beam irradiation induced fabrication of vertical coupling photonic structures

H. D. Liang, V. S. Kumar, J. F. Wu, M. B. H. Breese

Proceedings Volume 8629, 86290G (2013) https://doi.org/10.1117/12.2002922

KEYWORDS: Waveguides, Semiconducting wafers, Reactive ion etching, Ion beams, Silicon, Ions, Scanning electron microscopy, Oxides, Ultraviolet radiation, Photoresist materials

Read Abstract +

Two layer vertical coupling photonic structures can be directly fabricated on a standard SOI wafer using a combination of reactive ion etching (RIE) and proton beam irradiation followed by electrochemical etching. The top layer structures are defined by RIE on the device layer, while the bottom layer structures are defined by proton beam irradiation on the substrate. Light coupling between the structures in the two layers has been demonstrated via vertical coupling waveguides. According to simulations, the coupling efficiency mainly depends on the thickness of the two layer structure and the gap between them. In this process, the thickness of the top layer structures is fixed by the device layer thickness of the SOI wafer, which is typically 200-300 nm. The gap depends on the thickness of the oxide layer of the SOI wafer, and it can be shifted due to the natural bending of the top layer structures. The bottom layer structure thickness can vary due to different energies of proton beam. Furthermore we show the fabrication of tapered bottom waveguides, which are thin at the coupling region for higher coupling efficiency, and thick at the end for easily coupling light from an optical fiber or a focused lens.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years