The influence of substrate rotating on the microstructure and surface morphology has been investigated on Ge and Si
film. In this paper, the Ge and Si optical thin films were chosen to be research objects. The thin films were prepared on
Al2O3 substrate by electron beam evaporation in about 5×10-4 Pa vacuum pressure in two deposited methods: rotating
substrate and not rotating substrate. The films were observed and analyzed by X-ray diffraction analyzer, scanning
electron microscopy and atomic force microscopy. According to the wavelength deviation dispersion theory, the packing
density has been calculated. The results show that: in the two deposition methods, the films both are non-crystalline state
and compact, the film surface morphology is basically same and no significant defference in surface roughness, but the
film on no rotating substrate has higher packing density.