Dr. Haijing Peng Profile

Dr. Haijing Peng

at Chinese Univ of Hong Kong

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 May 2003 Paper

Low-level birefringence detection system for stress measurement in semiconductors

Haijing Peng, Sai-peng Wong, Xiang Hua Liu, Yiu Wai Lai, Ho-pui Ho, Shounan Zhao

Proceedings Volume 5144, (2003) https://doi.org/10.1117/12.500420

KEYWORDS: Birefringence, Silicon, Semiconducting wafers, Signal detection, Photoelasticity, Sensors, Modulation, Semiconductors, Polarizers, Amplifiers

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years