Prof. Haiwon Lee Profile

Prof. Haiwon Lee

at Hanyang Univ

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 27 March 2014 Paper

Inorganic resist materials based on zirconium phosphonate for atomic force microscope lithography

Mankyu Kang, Seonae Kim, JinHyuck Jung, Heebom Kim, Inkyun Shin, Chanuk Jeon, Haiwon Lee

Proceedings Volume 9051, 90511U (2014) https://doi.org/10.1117/12.2045641

KEYWORDS: Lithography, Zirconium, Atomic force microscopy, Metals, Coating, Image processing, Electron beam lithography, Oxides, Atomic force microscope, Line edge roughness

Read Abstract +

Proceedings Article | 1 June 1992 Paper

Poly(p-trimethylgermylstyrene sulfone)s as a high-resolution electron-beam resist

Seong-Ju Kim, Byung-Sun Park, Haiwon Lee

Proceedings Volume 1672, (1992) https://doi.org/10.1117/12.59767

KEYWORDS: Electron beams, Ultraviolet radiation, X-rays, Silicon, Absorption, Resistance, Oxygen, Spectroscopy, Polymers, Manganese

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years