Han Geun Yu
at The Pennsylvania State Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 October 2001 Paper
Proc. SPIE. 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
KEYWORDS: Ferroelectric materials, Electrodes, Capacitors, Microelectromechanical systems, Deep reactive ion etching, Etching, Semiconducting wafers, Thin films, Silicon, Sensors

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