Prof. Hans Peter Herzig Profile

Prof. Hans Peter Herzig

Professor at Ecole Polytechnique Federale de Lausanne

SPIE Involvement:

Conference Program Committee | Author

Publications (117)

Proceedings Article | 30 June 2021 Open Access

Focal Plane Array Spectrometer FPAS: preliminary development results and recommendations

M. Madi, G. Osowiecki, E. Alberti, H. P. Herzig

Proceedings Volume 11852, 118526V (2021) https://doi.org/10.1117/12.2604387

KEYWORDS: Waveguides, Spectroscopy, Staring arrays, Single mode fibers, Telescopes, Mirrors, Astronomical imaging, Microlens, Signal attenuation, Fourier transforms

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The focal plane array spectrometer (FPAS) is a miniaturization concept for imaging spectrometers compared to classical dispersive and FTS instruments. FPAS is an imaging implementation of interferogram integrated FTS, targeting space-borne and commercial applications. It is based on a bi-dimensional array of waveguide spectrometers which can be assembled in small size, and form a compact package of single spectrometers. When this system is positioned in the focal plane of an objective (in a similar way as a CMOS detector array or a CCD in a camera), it will allow imaging spectrometry of the observed surface (objects). The instrument is therefore reduced to the imaging optics and the FPAS in the focal plane, which takes over the role of spectrometer and detector array. This is a breakthrough concept enabling imaging spectroscopy in a reduced volume with low power consumption. This article describes the preliminary development results of a FPAS based on arrays of single-mode waveguides. The developed linear array forms an acquisition line to image with lateral scanning. The light is injected with micro-lenses into several optical polymer waveguides. In order to circumvent the sub-sampling limitation due to nano-sampler spacing and to expand the spectral bandwidth, the basic principle of a static Lippmann spectrometer is combined with a dynamic Fourier-transform spectrometer, by adopting a piezo actuated movable mirror located at the waveguide end-facet. This waveguide spectrometer is designed for a nominal bandwidth of 25 nm at central wavelength of 762.5 nm and a spectral resolution of about 0.06 nm. The throughput and SNR in this preliminary linear array prototype are analysed and design limitations are discussed. The authors then introduce a new method for the realization of FPAS aiming at enhancing throughput and bandwidth of the integrated device. This new concept uses a bundle of single-mode waveguides, instead of only one, at the focal distance of the optical element. The novel FPAS concept is elaborated and its characteristics are described.

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Proceedings Article | 26 March 2019 Paper

Spatial coherence properties of an LED-based illumination system for mask-aligner lithography

Johana Bernasconi, Toralf Scharf, Raoul Kirner, Wilfried Noell, Reinhard Voelkel, Hans Peter Herzig

Proceedings Volume 10958, 109581D (2019) https://doi.org/10.1117/12.2514964

KEYWORDS: Spatial coherence, Lithographic illumination, Light emitting diodes, Lithography, Reflectors

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Proceedings Article | 19 September 2018 Paper

Waveguide grating as a Bragg mirror on Bloch surface waves based platform for 2D integrated optics applications

R. Dubey, B. Vosoughi Lahijani, M. Roussey, H. P. Herzig

Proceedings Volume 10730, 107300O (2018) https://doi.org/10.1117/12.2320858

KEYWORDS: Waveguides, Mirrors, Photonics, Integrated optics, Near field optics, Dielectrics, Near field scanning optical microscopy, Reflectivity, Dispersion, Optical design

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Proceedings Article | 14 September 2018 Paper

High power modular LED-based illumination system for lithography applications

Johana Bernasconi, Toralf Scharf, Marcel Groccia, Raoul Kirner, Wilfried Noell, Hans Peter Herzig

Proceedings Volume 10758, 107580A (2018) https://doi.org/10.1117/12.2319288

KEYWORDS: Light emitting diodes, Lamps, Mercury, Reflectors, Lithographic illumination, Photomasks, Lithography, Printing, Prototyping

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Proceedings Article | 14 March 2018 Presentation

Photonic crystals for Bloch surface wave propagation based on lithium niobate thin films (Conference Presentation)

Tatiana Kovalevich, Djaffar Belharet, Laurent Robert, Thierry Grosjean, Myun-Sik Kim, Hans Peter Herzig, Maria-Pilar Bernal

Proceedings Volume 10544, 1054418 (2018) https://doi.org/10.1117/12.2309704

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Proceedings Article | 2 January 2018 Paper

Manipulation of Bloch surface waves: from subwavelength focusing to nondiffracting beam

Myun-Sik Kim, Hans Peter Herzig

Proceedings Volume 10456, 104561U (2018) https://doi.org/10.1117/12.2283194

KEYWORDS: Near field scanning optical microscopy, Photonics, Dielectrics, Near field, Diffraction gratings, Nondiffracting beams, Optical components, Diffraction

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Proceedings Article | 27 February 2017 Paper

Light fields behind microstructures: study of the Babinet-principle in the Fresnel regime

Toralf Scharf, Myun-Sik Kim, Krishnaparvathy Puthankovilakam, Hans Peter Herzig, Reinhard Voelkel

Proceedings Volume 10120, 1012010 (2017) https://doi.org/10.1117/12.2251379

KEYWORDS: Computer simulations, Objectives, Modulation, Distance measurement, Radio propagation, Electromagnetism, Diffraction, Near field diffraction, Interferometry, Electromagnetic radiation, Diffraction gratings, Singular optics, Polarization, Near field, Nanofabrication

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Proceedings Article | 20 February 2017 Presentation + Paper

Scaling effect and its impact on wavelength-scale microlenses

Myun-Sik Kim, Toralf Scharf, Hans Peter Herzig, Reinhard Voelkel

Proceedings Volume 10116, 1011608 (2017) https://doi.org/10.1117/12.2256635

KEYWORDS: Microlens, Diffraction, Refraction, Lenses, Micro optics, Microelectromechanical systems, Optical components, Photonics, Geometrical optics, Optical spheres, Scattering, Glasses, Near field

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Proceedings Article | 16 February 2017 Presentation + Paper

Near-field investigation of Bloch surface wave based 2D optical components

R. Dubey, B. Vosoughi Lahijani, M.-S. Kim, E. Barakat, M. Häyrinen, M. Roussey, M. Kuittinen, H. P. Herzig

Proceedings Volume 10106, 101061G (2017) https://doi.org/10.1117/12.2250394

KEYWORDS: Near field scanning optical microscopy, Resonators, Dielectrics, Integrated optics, Photonics, Near field optics, Finite-difference time-domain method, Heterodyning, Optical microscopy, Nanostructures, Optical components, Axicons, Multilayers, Near field, Dielectric polarization, Prisms

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Proceedings Article | 8 November 2016 Presentation

Polarization controlled directional excitation of Bloch surface waves (Conference Presentation)

Tatiana Kovalevich, Philippe Boyer, Maria-Pilar Bernal, Myun-Sik Kim, Hans Peter Herzig, Thierry Grosjean

Proceedings Volume 9919, 991907 (2016) https://doi.org/10.1117/12.2248261

KEYWORDS: Dielectric polarization, Dielectrics, Photonic crystals, Electromagnetism, Interfaces, Surface plasmon polaritons, Silica, Integrated optics, Finite-difference time-domain method, Radio propagation

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Proceedings Article | 27 April 2016 Paper

Precision glass molding of high-resolution diffractive optical elements

Karin Prater, Julia Dukwen, Toralf Scharf, Hans Herzig, Sven Plöger, Andreas Hermerschmidt

Proceedings Volume 9888, 98880U (2016) https://doi.org/10.1117/12.2228873

KEYWORDS: Glasses, Carbon, Precision glass molding, Diffractive optical elements, Photomasks, Lithography, Micro optics, Fabrication, Electron beam lithography, Reactive ion etching, Optical resolution, Integrated optics, Etching, Silicon, Beam splitters, Scanning electron microscopy, Diffraction, Silica

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Proceedings Article | 15 March 2016 Paper

Phase analysis of amplitude binary mask structures

Krishnaparvathy Puthankovilakam, Toralf Scharf, Hans Peter Herzig, Uwe Vogler, Arianna Bramati, Reinhard Voelkel

Proceedings Volume 9780, 97800V (2016) https://doi.org/10.1117/12.2219062

KEYWORDS: Printing, Optical proximity correction, Binary data, Phase measurement, Phase shift keying, Image resolution, Microscopy, Diffraction, Visualization, Phase shifting

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Proceedings Article | 15 March 2016 Paper

Coherence management in lithography printing systems

Johana Bernasconi, Toralf Scharf, Hans Peter Herzig, Reinhard Voelkel, Arianna Bramati

Proceedings Volume 9780, 978016 (2016) https://doi.org/10.1117/12.2219115

KEYWORDS: Lithographic illumination, Lithography, Printing, Spatial coherence, Photomasks, Diffraction, Imaging systems, Coherence (optics), Optical proximity correction, Electroluminescent displays, Microlens array, LED lighting

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Proceedings Article | 15 March 2016 Paper

Transition of optical regime in miniaturized optical systems: light interactions beyond the refraction limit

Myun-Sik Kim, Toralf Scharf, Carsten Rockstuhl, Wataru Nakagawa, Reinhard Voelkel, Hans Peter Herzig

Proceedings Volume 9760, 97600W (2016) https://doi.org/10.1117/12.2225366

KEYWORDS: Refraction, Photonic nanostructures, Optical components, Spherical lenses, Electromagnetic scattering, Diffraction, Mie scattering, Optical aberrations, Miniature imaging systems, Optical spheres, Photonics, Geometrical optics, Objectives, Silicon, Nanotechnology

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Proceedings Article | 4 March 2016 Paper

Structured amplitude and phase fields behind microstructures: the quest for high contrast modulation at proximity

Toralf Scharf, Myun-Sik Kim, Krishnaparvathy Puthankovilakam, Johana Bernasconi, Hans-Peter Herzig, Uwe Vogler, Reinhard Voelkel

Proceedings Volume 9764, 97640B (2016) https://doi.org/10.1117/12.2214341

KEYWORDS: Photomasks, Phase shift keying, Phase measurement, Modulation, Printing, Lithography, Neodymium, Diffraction, Stray light, Geometrical optics

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SPIE Journal Paper | 29 January 2016 Open Access

Intensity and phase fields behind phase-shifting masks studied with high-resolution interference microscopy

Krishnaparvathy Puthankovilakam, Toralf Scharf, Myun-Sik Kim, Ali Naqavi, Hans Peter Herzig, Tina Weichelt, Uwe Zeitner, Uwe Vogler, Reinhard Voelkel

JM3, Vol. 15, Issue 02, 021203, (January 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.2.021203

KEYWORDS: Phase shifts, Photomasks, Printing, Phase measurement, Microscopy, Diffraction, Quartz, Semiconducting wafers, Resolution enhancement technologies

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Proceedings Article | 24 September 2015 Paper

Multilevel micro-structuring of glassy carbon molds for precision glass molding

Karin Prater, Julia Dukwen, Toralf Scharf, Hans Peter Herzig, Sven Plöger, Andreas Hermerschmidt

Proceedings Volume 9628, 96281M (2015) https://doi.org/10.1117/12.2191661

KEYWORDS: Glasses, Etching, Precision glass molding, Beam splitters, Diffractive optical elements, Silicon, Carbon, Optical fabrication, Reactive ion etching, Semiconducting wafers

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Proceedings Article | 23 September 2015 Paper

Micro-optical freeform elements for beam-shaping

Daniel Infante-Gómez, Hans Peter Herzig

Proceedings Volume 9630, 96300N (2015) https://doi.org/10.1117/12.2190930

KEYWORDS: Chemical elements, Light sources, Image quality, Optical components, Diffractive optical elements, Photovoltaics, Inverse optics, Laser ablation, Freeform optics, Light wave propagation

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Proceedings Article | 1 September 2015 Paper

Standing wave integrated Fourier transform spectrometer for imaging spectrometry in the near infrared

Gaël Osowiecki, Mohammad Madi, Ivan Shorubalko, Irène Philipoussis, Edoardo Alberti, Toralf Scharf, Hans Herzig

Proceedings Volume 9611, 96110P (2015) https://doi.org/10.1117/12.2188170

KEYWORDS: Waveguides, Mirrors, Spectroscopy, Glasses, Fourier transforms, Infrared spectroscopy, Gold, Microlens, Light scattering, Imaging spectrometry

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Proceedings Article | 21 August 2015 Presentation + Paper

Real-time protein aggregation monitoring based on a simultaneous light scattering investigation and a Bloch surface wave-based approach

Sara Santi, Elsie Barakat, Reinhard Neier, Hans Peter Herzig

Proceedings Volume 9550, 95500V (2015) https://doi.org/10.1117/12.2188595

KEYWORDS: Light scattering, Proteins, Multilayers, Refractive index, Alzheimer's disease, Scatter measurement, Photonic crystals, Dielectrics, Polarization, Sensors

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Proceedings Article | 18 March 2015 Paper

Intensity and phase fields behind Phase Shifting Masks studied with High Resolution Interference Microscopy

Krishnaparvathy Puthankovilakam, Toralf Scharf, Hans Peter Herzig, Tina Weichelt, Uwe Zeitner, Uwe Vogler, Reinhard Voelkel

Proceedings Volume 9426, 94260I (2015) https://doi.org/10.1117/12.2085804

KEYWORDS: Printing, Photomasks, Phase shifts, Diffraction, Phase shifting, Microscopy, Phase measurement, Optical proximity correction, Quartz, Tolerancing

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Proceedings Article | 13 March 2015 Paper

Multilevel micro-structuring of glassy carbon for precision glass molding of diffractive optical elements

Karin Prater, Julia Dukwen, Toralf Scharf, Hans Peter Herzig, Sven Plöger, Andreas Hermerschmidt

Proceedings Volume 9374, 937410 (2015) https://doi.org/10.1117/12.2080762

KEYWORDS: Glasses, Etching, Diffractive optical elements, Precision glass molding, Titanium, Silica, Carbon, Photomasks, Power meters, Reactive ion etching

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Proceedings Article | 10 March 2015 Paper

Interferometric study on Gouy phase anomaly of microlens array

Myun-Sik Kim, Toralf Scharf, Wilfried Noell, Hans Peter Herzig, Reinhard Voelkel

Proceedings Volume 9386, 93860Z (2015) https://doi.org/10.1117/12.2182201

KEYWORDS: Spherical lenses, Microlens, Phase shifts, Finite-difference time-domain method, Interferometry, Microlens array, Diffraction, Phase measurement, Phase shift keying, Micro optics

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Proceedings Article | 25 September 2014 Paper

Surface micro-structuring of glassy carbon for precision glass molding of diffractive optical elements

Karin Prater, Julia Dukwen, Toralf Scharf, Hans Peter Herzig, Andreas Hermerschmidt

Proceedings Volume 9192, 919211 (2014) https://doi.org/10.1117/12.2062904

KEYWORDS: Glasses, Etching, Titanium, Carbon, Diffractive optical elements, Reactive ion etching, Glass molding, Photomasks, Silica, Precision glass molding

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Proceedings Article | 18 August 2014 Paper

Shaping intensity behind amplitude masks for proximity correction lithography: design, measurement, and realization

Krishnaparvathy Puthankovilakam, Toralf Scharf, Qing Tan, Hans Peter Herzig, David Nguyen, Uwe Vogler, Arianna Bramati, Reinhard Voelkel

Proceedings Volume 9203, 92031B (2014) https://doi.org/10.1117/12.2060954

KEYWORDS: Photomasks, Lithography, Optical proximity correction, Lithographic illumination, Resolution enhancement technologies, Printing, Microscopes, Beam splitters, Objectives, Structural design

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Proceedings Article | 8 May 2014 Paper

Localized biomolecular sensing enabled through plasmonic nanocavities

Gaël Osowiecki, Elsie Barakat, Ali Naqavi, Hans Peter Herzig

Proceedings Volume 9129, 91292B (2014) https://doi.org/10.1117/12.2052822

KEYWORDS: Waveguides, Sensors, Refractive index, Plasmonics, Photonics, Biosensing, Silicon, Gold, Metals, Dielectrics

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Proceedings Article | 8 May 2014 Paper

Real-time protein aggregation monitoring with a Bloch surface wave-based approach

Sara Santi, Elsie Barakat, Emiliano Descrovi, Reinhard Neier, Hans Peter Herzig

Proceedings Volume 9129, 912918 (2014) https://doi.org/10.1117/12.2052842

KEYWORDS: Refractive index, Proteins, Silicon, Alzheimer's disease, Photonic crystals, Water, Sensors, Dielectrics, Calibration, Interfaces

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Proceedings Article | 7 March 2014 Paper

Wafer-level microstructuring of glassy carbon

Loïc Hans, Karin Prater, Cédric Kilchoer, Toralf Scharf, Hans Peter Herzig, Andreas Hermerschmidt

Proceedings Volume 8974, 89740Y (2014) https://doi.org/10.1117/12.2038396

KEYWORDS: Etching, Carbon, Titanium, Aluminum, Reactive ion etching, Photomasks, Photoresist materials, Semiconducting wafers, Glasses, Optical lithography

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SPIE Journal Paper | 24 September 2013 Open Access

Publisher’s note: Light confinement effect of nonspherical nanoscale solid immersion lenses

Myun-Sik Kim, Toralf Scharf, David Nguyen, Ethan Keeler, Skyler Rydberg, Wataru Nakagawa, Gaël Osowiecki, Reinhard Voelkel, Hans Peter Herzig

JM3, Vol. 12, Issue 04, 041299, (September 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.4.041299

KEYWORDS: Solids, Lenses, Photonics, Micro optics, Microelectromechanical systems, Photonic devices, Computer engineering

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Proceedings Article | 24 September 2013 Paper

Polymer based single mode optical waveguide for spectroscopy applications

Maurine Malak, Irène Philipoussis, Hans Peter Herzig, Toralf Scharf

Proceedings Volume 8846, 884615 (2013) https://doi.org/10.1117/12.2023678

KEYWORDS: Waveguides, Polishing, Polymers, Glasses, Polymer multimode waveguides, Spectroscopy, Refractive index, Optical fibers, Semiconducting wafers, Scanning electron microscopy

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SPIE Journal Paper | 1 July 2013 Open Access

Field curvature correction in multichannel miniature imaging systems suited for wafer-level production

Eric Logean, Toralf Scharf, Nicolas Bongard, Hans Peter Herzig, Markus Rossi

OE, Vol. 52, Issue 07, 075101, (July 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.7.075101

KEYWORDS: Monochromatic aberrations, Objectives, Image sensors, Image quality, Sensors, Semiconducting wafers, Modulation transfer functions, Satellites, Wafer-level optics, Miniature imaging systems

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SPIE Journal Paper | 12 June 2013

Light confinement effect of nonspherical nanoscale solid immersion lenses

Myun-Sik Kim, Toralf Scharf, David Nguyen, Ethan Keeler, Skyler Rydberg, Wataru Nakagawa, Gaël Osowiecki, Reinhard Voelkel, Hans Peter Herzig

JM3, Vol. 12, Issue 02, 023015, (June 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.2.023015

KEYWORDS: Solids, Nanolithography, Lenses, Spherical lenses, Polymethylmethacrylate, Lithography, Electron beam lithography, Silicon, Microscopes, Objectives

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Proceedings Article | 7 March 2013 Paper

Multiple-field approach for aberration correction in miniature imaging systems based on wafer-level production

Eric Logean, Toralf Scharf, Nicolas Bongard, Hans Peter Herzig, Markus Rossi

Proceedings Volume 8667, 86671E (2013) https://doi.org/10.1117/12.2004390

KEYWORDS: Electroluminescent displays, Objectives, Semiconducting wafers, Sensors, Image sensors, Satellites, Monochromatic aberrations, Satellite imaging, Modulation transfer functions, Imaging systems

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Proceedings Article | 5 March 2013 Paper

Low-NA focused vortex beam lithography for below 100-nm feature size at 405 nm illumination

Myun-Sik Kim, Toralf Scharf, Hans Peter Herzig, Reinhard Voelkel

Proceedings Volume 8613, 86131A (2013) https://doi.org/10.1117/12.2002138

KEYWORDS: Lithography, Nanolithography, Polarizers, Polarization, Scanning electron microscopy, Dielectric polarization, Photoresist materials, Photomasks, Lithographic illumination, Solids

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Proceedings Article | 5 March 2013 Paper

Light confinement effect of non-spherical nanoscale solid immersion lenses

Myun-Sik Kim, Toralf Scharf, David Nguyen, Ethan Keeler, Skyler Rydberg, Wataru Nakagawa, Gaël Osowecki, Hans Peter Herzig, Reinhard Voelkel

Proceedings Volume 8613, 86131B (2013) https://doi.org/10.1117/12.2002145

KEYWORDS: Solids, Nanolithography, Spherical lenses, Polymethylmethacrylate, Electron beam lithography, Lithography, Lenses, Silicon, 3D metrology, Microscopes

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Proceedings Article | 18 December 2012 Paper

High numerical aperture silicon collimating lens for mid-infrared quantum cascade lasers manufactured using wafer-level techniques

Eric Logean, Lubos Hvozdara, Joab Di-Francesco, Hans Peter Herzig, Reinhard Voelkel, Martin Eisner, Pierre-Yves Baroni, Michel Rochat, Antoine Müller

Proceedings Volume 8550, 85500Q (2012) https://doi.org/10.1117/12.981165

KEYWORDS: Silicon, Quantum cascade lasers, Semiconducting wafers, Mid-IR, Etching, Photoresist processing, Aspheric lenses, Manufacturing, Reactive ion etching, Micro optics

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Proceedings Article | 5 May 2012 Paper

Advanced optical characterization of micro solid immersion lens

Myun-Sik Kim, Toralf Scharf, Mickael Brun, Segolene Olivier, Sergio Nicoletti, Hans Peter Herzig

Proceedings Volume 8430, 84300E (2012) https://doi.org/10.1117/12.921871

KEYWORDS: Beam shaping, Solids, Polarization, 3D metrology, Refractive index, Microscopes, Polarizers, Silica, Illumination engineering, Refraction

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Proceedings Article | 15 February 2012 Paper

Axial phase measurements of light interacting with microstructures

Myun-Sik Kim, Toralf Scharf, Hans Peter Herzig

Proceedings Volume 8250, 825007 (2012) https://doi.org/10.1117/12.905461

KEYWORDS: Phase measurement, Interferometry, Photonics, Phase velocity, Phase shifts, Optical spheres, 3D metrology, Microscopes, Light wave propagation, Wave propagation

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Proceedings Article | 11 February 2012 Paper

Generation of highly confined optical bottle beams by exploiting the photonic nanojet effect

Myun-Sik Kim, Toralf Scharf, Stefan Mühlig, Carsten Rockstuhl, Hans Peter Herzig

Proceedings Volume 8274, 82740U (2012) https://doi.org/10.1117/12.905459

KEYWORDS: Optical spheres, Photonic nanostructures, Gaussian beams, Wavefronts, Dielectrics, Illumination engineering, Mirrors, Bessel beams, Particles, Atmospheric particles

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Proceedings Article | 9 February 2012 Paper

Optical characterization of subwavelength-scale solid immersion lenses

Myun-Sik Kim, Toralf Scharf, Mohammad Tahdiul Haq, Wataru Nakagawa, Hans Peter Herzig

Proceedings Volume 8249, 82491B (2012) https://doi.org/10.1117/12.905472

KEYWORDS: Spherical lenses, Solids, Polymethylmethacrylate, Glasses, Polymers, Lithography, Electron beam lithography, 3D metrology, Interfaces, Near field optics

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Proceedings Article | 15 June 2011 Paper

Investigation of protein aggregation dynamics with a Bloch surface wave sensor

Vincent Paeder, Sara Santi, Valeria Musi, Hans Peter Herzig

Proceedings Volume 8090, 80900C (2011) https://doi.org/10.1117/12.889698

KEYWORDS: Proteins, Sensors, Wave sensors, Alzheimer's disease, Heterodyning, FT-IR spectroscopy, Spectroscopy, Biomedical optics, Pathogens, Fluorescence spectroscopy

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Proceedings Article | 27 May 2011 Paper

Measuring amplitude and phase of light emerging from microstructures with HRIM

Toralf Scharf, Myun-Sik Kim, Hans Peter Herzig

Proceedings Volume 8082, 80821O (2011) https://doi.org/10.1117/12.895011

KEYWORDS: Diffraction, Diffraction gratings, Objectives, Phase measurement, Near field diffraction, Microscopy, 3D metrology, Image resolution, Charge-coupled devices, Distance measurement

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Proceedings Article | 20 April 2011 Paper

Enhanced light trapping in realistic thin film solar cells using one-dimensional gratings

A. Naqavi, K. Söderström, F.-J. Haug, V. Paeder, T. Scharf, H. Herzig, C. Ballif

Proceedings Volume 8065, 80650A (2011) https://doi.org/10.1117/12.883186

KEYWORDS: Polarization, External quantum efficiency, Silver, Aluminum, Thin film solar cells, Solar cells, Binary data, Absorption, Interfaces, Reflection

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Proceedings Article | 14 February 2011 Paper

Shaping light with MOEMS

W. Noell, S. Weber, J. Masson, J. Extermann, L. Bonacina, A. Bich, R. Bitterli, H. P. Herzig, D. Kiselev, T. Scharf, R. Voelkel, K. Weible, J.-P. Wolf, N. de Rooij

Proceedings Volume 7930, 79300P (2011) https://doi.org/10.1117/12.873051

KEYWORDS: Mirrors, Diffusers, Microopto electromechanical systems, Actuators, Micromirrors, Silicon, Ultraviolet radiation, Beam shaping, Pulse shaping, Magnetism

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Proceedings Article | 17 January 2011 Paper

Photonic nanojet engineering: focal point shaping with scattering phenomena of dielectric microspheres

Myun-Sik Kim, Toralf Scharf, Stefan Mühlig, Carsten Rockstuhl, Hans Peter Herzig

Proceedings Volume 7941, 794115 (2011) https://doi.org/10.1117/12.887604

KEYWORDS: Optical spheres, Wavefronts, Photonic nanostructures, Spherical lenses, Bessel beams, Objectives, Wave propagation, Illumination engineering, Diffraction, Scattering

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SPIE Journal Paper | 1 January 2011

Demonstration of superprism effect in silicon pillar 2-D photonic crystal infiltrated with liquid crystals

Pierre-Yves Baroni, Vincent Paeder, Yu-Chi Chang, Matthieu Roussey, Hans Peter Herzig, Wataru Nakagawa

OE, Vol. 50, Issue 01, 014601, (January 2011) https://doi.org/10.1117/12.10.1117/1.3529437

KEYWORDS: Liquid crystals, Photonic crystals, Silicon, Waveguides, Liquid crystal on silicon, Silicon photonics, Modulation, Refractive index, Infrared cameras, Optical engineering

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Proceedings Article | 17 February 2010 Paper

Deformable silicon membrane for dynamic linear laser beam diffuser

J. Masson, A. Bich, H. P. Herzig, R. Bitterli, W. Noell, T. Scharf, R. Voelkel, K. Weible, N. de Rooij

Proceedings Volume 7594, 75940F (2010) https://doi.org/10.1117/12.842015

KEYWORDS: Diffusers, Mirrors, Silicon, Aluminum, Semiconductor lasers, Magnetism, Actuators, Coating, Deep reactive ion etching, Crystals

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Proceedings Article | 17 September 2008 Paper

Refractive statistical concave 1D diffusers for laser beam shaping

Roland Bitterli, Myunsik Kim, Toralf Scharf, Hans-Peter Herzig, Andreas Bich, Christine Dumouchel, Sylvain Roth, Reinhard Völkel, K. Weible

Proceedings Volume 7062, 70620P (2008) https://doi.org/10.1117/12.793605

KEYWORDS: Diffusers, Photomasks, Etching, Diffusion, Silica, Data modeling, Microlens, Isotropic etching, Spherical lenses, Optical components

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Proceedings Article | 14 May 2008 Paper

Polarization sensitive diffuser

Patrick Ruffieux, Toralf Scharf, Hans Peter Herzig

Proceedings Volume 6992, 69920N (2008) https://doi.org/10.1117/12.781026

KEYWORDS: Diffusers, Polarization, Molecules, Liquid crystals, Polymers, Ultraviolet radiation, Birefringence, Polarizers, Glasses, Liquids

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Proceedings Article | 14 May 2008 Paper

Refraction and interference in micro- and nanostructure optical elements

Toralf Scharf, Sylvain Jaquet, Patrick Ruffieux, Hans Peter Herzig

Proceedings Volume 6992, 69920E (2008) https://doi.org/10.1117/12.780984

KEYWORDS: Reflectors, Reflection, Adhesives, Nanolithography, Polymers, Glasses, Prisms, Reflectivity, Nanostructures, Scanning electron microscopy

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Proceedings Article | 14 February 2008 Paper

Multifunctional micro-optical elements for laser beam homogenizing and beam shaping

A. Bich, J. Rieck, C. Dumouchel, S. Roth, K. Weible, M. Eisner, R. Voelkel, M. Zimmermann, M. Rank, M. Schmidt, R. Bitterli, N. Ramanan, P. Ruffieux, T. Scharf, W. Noell, H.-P. Herzig, Nico De Rooij

Proceedings Volume 6879, 68790Q (2008) https://doi.org/10.1117/12.762923

KEYWORDS: Diffusers, Microlens array, Microlens, Beam homogenizers, Laser applications, Homogenization, Telescopes, Beam shaping, Diffraction, Mirrors

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Proceedings Article | 1 August 2007 Paper

Corrugated grating on organic multilayer Bragg reflector

Sylvain Jaquet, Toralf Scharf, Hans Peter Herzig

Proceedings Volume 6785, 678517 (2007) https://doi.org/10.1117/12.757912

KEYWORDS: Multilayers, Polymers, Mirrors, Diffraction gratings, Reflectors, Reflection, Refractive index, Specular reflections, Glasses, Ultraviolet radiation

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Proceedings Article | 5 March 2007 Paper

Sub-Doppler diode laser frequency stabilization with the DAVLL scheme on the D1 line of a 87Rb vapor-cell

R. Giannini, E. Breschi, C. Affolderbach, G. Bison, G. Mileti, H. Herzig, A. Weis

Proceedings Volume 6604, 66040L (2007) https://doi.org/10.1117/12.726895

KEYWORDS: Laser stabilization, Doppler effect, Absorption, Polarization, Magnetism, Rubidium, Laser beam diagnostics, Semiconductor lasers, Heterodyning, Signal generators

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Proceedings Article | 27 April 2006 Paper

AFM benchmark for the profile characterisation of subwavelength diffractive elements within the EC Network of Excellence on Micro-Optics (NEMO)

N. Destouches, H. Herzig, W. Nakagawa, H. Ottevaere, J. Pietarinen, S. Reynaud, J. Tervo, S. Tonchev, J. Turunen, J. Van Erps, M. Kujawinska

Proceedings Volume 6188, 61881K (2006) https://doi.org/10.1117/12.668466

KEYWORDS: Atomic force microscopy, Diffraction gratings, Scanning electron microscopy, Calibration, Optical testing, Micro optics, Metrology, Inverse optics, Scanners, Etching

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Proceedings Article | 21 April 2006 Paper

Parallel atomic force microscopy using optical heterodyne detection

Laura Chantada, Myun-Sik Kim, Omar Manzardo, René Dändliker, Laure Aeschimann, Urs Staufer, Peter Vettiger, Kenneth Weible, Hans Peter Herzig

Proceedings Volume 6186, 61860B (2006) https://doi.org/10.1117/12.664452

KEYWORDS: Heterodyning, Atomic force microscopy, Michelson interferometers, Interferometers, Beam splitters, Binary data, Bragg cells, Photodetectors, Signal detection, Atomic force microscope

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Proceedings Article | 21 April 2006 Paper

Achromatic microlenses

Patrick Ruffieux, Toralf Scharf, Hans Peter Herzig, Reinhard Voelkel, Kenneth Weible

Proceedings Volume 6185, 618514 (2006) https://doi.org/10.1117/12.661962

KEYWORDS: Microlens, Diffraction, Geometrical optics, Gaussian beams, Refractive index, Optical properties, Wave propagation, Chromatic aberrations, Micro optics, Refraction

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Proceedings Article | 20 April 2006 Paper

Fabrication of large-area two-dimensional photonic crystals using interference lithography and direct writing of defects

Pierre-Yves Baroni, Toralf Scharf, Hans Peter Herzig

Proceedings Volume 6182, 61821V (2006) https://doi.org/10.1117/12.661921

KEYWORDS: Photonic crystals, Semiconducting wafers, Silicon, Reactive ion etching, Lithography, Photoresist materials, Lamps, Waveguides, Nanolithography, Crystals

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Proceedings Article | 23 January 2006 Paper

Tunable microcavities in planar photonic crystals

Iwan Märki, Martin Salt, H. P. Herzig

Proceedings Volume 6114, 61140B (2006) https://doi.org/10.1117/12.659901

KEYWORDS: Optical microcavities, Photonic crystals, Silicon, Modulation, Waveguides, Plasma, Switching, Beam controllers, Dispersion, Integrated optics

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Proceedings Article | 14 March 2005 Paper

On the coupling and transmission of transverse and longitudinal fields into fully metal-coated optical nano-probes

Emiliano Descrovi, Luciana Vaccaro, Laure Aeschimann, Wataru Nakagawa, Urs Staufer, Toralf Scharf, Hans Peter Herzig

Proceedings Volume 5736, (2005) https://doi.org/10.1117/12.589778

KEYWORDS: Metals, Near field scanning optical microscopy, Near field, Near field optics, Polarization, Coating, Liquid crystals, Aluminum, Quartz, Radio propagation

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SPIE Journal Paper | 1 November 2004

Review of iterative Fourier-transform algorithms for beam shaping applications

Olivier Ripoll, Ville Kettunen, Hans Peter Herzig

OE, Vol. 43, Issue 11, (November 2004) https://doi.org/10.1117/12.10.1117/1.1804543

KEYWORDS: Computer generated holography, Beam shaping, Binary data, Diffractive optical elements, Electro-optical engineering, Beam splitters, Fourier transforms, Optical design, Optical engineering, Quantization

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Proceedings Article | 8 September 2004 Paper

Comparative study of glass and plastic refractive microlenses and their fabrication techniques

Heidi Ottevaere, Royall Cox, Hans Peter Herzig, Takaaki Miyashita, Kris Naessens, Mohammad Taghizadeh, Reinhard Volkel, H.J. Woo, Hugo Thienpont

Proceedings Volume 5453, (2004) https://doi.org/10.1117/12.546709

KEYWORDS: Microlens, Photovoltaics, Reactive ion etching, Fabrication, Digital Light Processing, Lithography, Printing, Laser ablation, Geology, Mining

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Proceedings Article | 8 September 2004 Paper

Submicro-optics: big effects on a small scale

Martin Salt, Iwan Maerki, Guido Niederer, Carsten Rockstuhl, Christophe Weiteneder, Hans Peter Herzig

Proceedings Volume 5453, (2004) https://doi.org/10.1117/12.554938

KEYWORDS: Waveguides, Microlens, Photonic crystals, Particles, Liquid crystals, Nanoparticles, Glasses, Reflectivity, Silver, Optical filters

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Proceedings Article | 17 August 2004 Paper

Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

Paul Montgomery, Denis Montaner, Omar Manzardo, Hans-Peter Herzig

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545663

KEYWORDS: Objectives, Mirrors, Teeth, Microopto electromechanical systems, Spectroscopy, Microscopy, 3D metrology, Fourier transforms, Point spread functions, Modulation

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Proceedings Article | 17 August 2004 Paper

Metrology of refractive microlens arrays

Kenneth Weible, Reinhard Volkel, Martin Eisner, Samuel Hoffmann, Toralf Scharf, Hans-Peter Herzig

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545458

KEYWORDS: Microlens, Microlens array, Interferometers, Aspheric lenses, Spherical lenses, Metrology, Wavefronts, Optical spheres, Reactive ion etching, Semiconducting wafers

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Proceedings Article | 16 August 2004 Paper

Infrared MEMS-based Lamellar grating spectrometer

Omar Manzardo, Felix Shadelin, Wilfried Noell, Nicolaas de Rooij, Hans Peter Herzig

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545587

KEYWORDS: Spectroscopy, Mirrors, Diffraction gratings, Sensors, Diffraction, Xenon, Lamps, Interferometers, Actuators, Semiconductor lasers

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Proceedings Article | 16 August 2004 Paper

MEMS tunable filter for telecom applications

Thomas Overstolz, Guido Niederer, Wilfried Noell, Michael Gale, Hans Peter Herzig, Samuel Obi, Hans Thiele, Nicolaas de Rooij

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545581

KEYWORDS: Optical filters, Microelectromechanical systems, Actuators, Waveguides, Electrodes, Silicon, Deep reactive ion etching, Polarization, Capacitors, Etching

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Proceedings Article | 24 January 2004 Paper

Artificial compound eyes: different concepts and their application for ultraflat image acquisition sensors

Jacques Duparre, Peter Schreiber, Peter Dannberg, Toralf Scharf, Petri Pelli, Reinhard Voelkel, Hans-Peter Herzig, Andreas Braeuer

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.530208

KEYWORDS: Eye, Lenses, Microlens array, Sensors, Semiconducting wafers, Microlens, Superposition, Imaging systems, Image acquisition, Cameras

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Proceedings Article | 29 December 2003 Paper

One-dimensional and two-dimensional periodic structures for security devices, resonant filters, and photonic crystals

Hans Peter Herzig, Martin Salt, Werner Klaus, Christophe Weiteneder, Guido Niederer, Iwan Marki

Proceedings Volume 5184, (2003) https://doi.org/10.1117/12.504580

KEYWORDS: Waveguides, Photonic crystals, Diffraction gratings, Diffraction, Optical filters, Fabry–Perot interferometers, Chemical elements, Glasses, Binary data, Optical components

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Proceedings Article | 19 November 2003 Paper

Micro-fabricated spectral analysers

Omar Manzardo, Yves Petremand, Hans-Peter Herzig, Wilfried Noell, Nico de Rooij

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.530940

KEYWORDS: Optical fibers, Mirrors, Diffraction gratings, Silicon, Beam splitters, Interferometers, Michelson interferometers, Actuators, Optical components, Spectrometers

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Proceedings Article | 19 November 2003 Paper

Heterodyne scanning near-field optical microscope

Luciana Vaccaro, Antonello Nesci, Rene Dandliker, Hans-Peter Herzig

Proceedings Volume 4829, (2003) https://doi.org/10.1117/12.529222

KEYWORDS: Near field scanning optical microscopy, Heterodyning, Optical microscopes, Polarization, Near field optics, Phase measurement, Near field, Interferometry, Nd:YAG lasers, Diffraction gratings

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Proceedings Article | 3 November 2003 Paper

Periodic structures with arbitrary shapes recorded by multiple-beam interference

Christophe Weiteneder, Werner Klaus, Hans Peter Herzig

Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.508619

KEYWORDS: Photoresist materials, Scanning electron microscopy, Lithography, Optical components, Beam shaping, Diffractive optical elements, Antireflective coatings, Spatial frequencies, Control systems, Distortion

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Proceedings Article | 3 November 2003 Paper

Resonant grating filters at oblique incidence

Guido Niederer, Martin Salt, Hans Peter Herzig, Hans Thiele, Michael Gale, Christian Zschokke, Marc Schnieper

Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.512221

KEYWORDS: Waveguides, Optical filters, Diffraction gratings, Polarization, Planar waveguides, Refractive index, Diffraction, Absorption, Optical design, Tunable filters

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Proceedings Article | 19 April 2002 Paper

Zero-order gratings for optically variable devices

Wayne Tompkin, Andreas Schilling, Christophe Weiteneder, Hans Peter Herzig

Proceedings Volume 4677, (2002) https://doi.org/10.1117/12.462714

KEYWORDS: Diffraction gratings, Diffraction, Polarization, Visualization, Moire patterns, Optical design, Information visualization, Reflection, Mirrors, Superposition

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SPIE Journal Paper | 1 March 2002

Improved red color with cholesteric liquid crystals in Bragg reflection mode

Peter Kipfer, Rolf Klappert, Hans Peter Herzig, Joachim Grupp, Rene Daendliker

OE, Vol. 41, Issue 03, (March 2002) https://doi.org/10.1117/12.10.1117/1.1447229

KEYWORDS: Optical filters, Reflection, Birefringence, Reflectivity, LCDs, Reflectors, Liquid crystals, Optical engineering, Absorption, Eye

Proceedings Article | 1 February 2002 Paper

Massive free-space optical 1xN fiber switch using an adaptive membrane mirror

Frederic Gonte, Yves-Alain Peter, Hans Peter Herzig, Rene Daendliker

Proceedings Volume 4493, (2002) https://doi.org/10.1117/12.454729

KEYWORDS: Mirrors, Switches, Electrodes, Evolutionary algorithms, Single mode fibers, Deformable mirrors, Adaptive optics, Free space optics, Optical switching, Optimization (mathematics)

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Proceedings Article | 5 December 2001 Paper

Optical near-field phase singularities produced by microstructures

Antonello Nesci, Rene Daendliker, Martin Salt, Hans Peter Herzig

Proceedings Volume 4456, (2001) https://doi.org/10.1117/12.449524

KEYWORDS: Phase measurement, Polarization, Diffraction, Heterodyning, Diffraction gratings, Near field optics, Wave propagation, Microscopes, Scanning probe microscopes, Optical microscopes

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Proceedings Article | 13 November 2001 Paper

Design and modeling of a miniature system containing micro-optics

Norbert Lindlein, Hans Peter Herzig

Proceedings Volume 4437, (2001) https://doi.org/10.1117/12.448143

KEYWORDS: Ray tracing, Wave propagation, Diffraction, Gaussian beams, Optical components, Wavefronts, Systems modeling, Microlens array, Refraction, Beam propagation method

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Proceedings Article | 13 November 2001 Paper

Efficient beamshaping of high-power diode lasers using micro-optics

Hans Peter Herzig, Andreas Schilling, Laurent Stauffer, Urs Vokinger, Markus Rossi

Proceedings Volume 4437, (2001) https://doi.org/10.1117/12.448150

KEYWORDS: Diffractive optical elements, Glasses, Multimode fibers, Gradient-index optics, Wave propagation, Silica, Diffraction, Optical components, Antireflective coatings, Lithography

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SPIE Journal Paper | 1 July 2001

Low numerical aperture refractive microlenses in fused silica

Philippe Nussbaum, Hans Peter Herzig

OE, Vol. 40, Issue 07, (July 2001) https://doi.org/10.1117/12.10.1117/1.1385335

KEYWORDS: Microlens, Photoresist materials, Silica, Etching, Reactive ion etching, Spherical lenses, Mach-Zehnder interferometers, Lithography, Optical spheres, Wavefronts

Proceedings Article | 30 May 2001 Paper

Phase singularities generated by optical microstructures: theory and experimental results

Rene Dandliker, Peter Blattner, Carsten Rockstuhl, Hans Peter Herzig

Proceedings Volume 4403, (2001) https://doi.org/10.1117/12.428277

KEYWORDS: Spiral phase plates, Near field optics, Phase measurement, Diffraction, Microscopy, Binary data, Near field, Singular optics, Microscopes, Imaging systems

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SPIE Journal Paper | 1 May 2001

Microlens systems for fluorescence detection in chemical microsystems

Jean-Christophe Roulet, Reinhard Voelkel, Hans Peter Herzig, Sabeth Verpoorte, Nico de Rooij, Rene Daendliker

OE, Vol. 40, Issue 05, (May 2001) https://doi.org/10.1117/12.10.1117/1.1359522

KEYWORDS: Microlens, Luminescence, Molecules, Glasses, Fluorescence spectroscopy, Sensors, Spherical lenses, Photoresist materials, Semiconducting wafers, Microfabrication

Proceedings Article | 22 August 2000 Paper

New design for an integrated Fourier transform spectrometer

Omar Manzardo, Hans Peter Herzig, Benedikt Guldimann, Cornel Marxer, Nico de Rooij

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396502

KEYWORDS: Mirrors, Fourier transforms, Spectroscopy, Sensors, Collimation, Modulation, Silicon, Actuators, Beam splitters, Optical components

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Proceedings Article | 18 August 2000 Paper

Fabrication technologies for micro-optical elements with arbitrary surfaces

Andreas Schilling, Philippe Nussbaum, Irene Philipoussis, Hans Peter Herzig, Laurent Stauffer, Markus Rossi, Ernst-Bernhard Kley

Proceedings Volume 4179, (2000) https://doi.org/10.1117/12.395692

KEYWORDS: Photoresist materials, Photomasks, Lithography, Binary data, Silica, Reactive ion etching, Multiphoton lithography, Optical lithography, Diffraction, Optical components

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SPIE Journal Paper | 1 August 2000

Surface profiles of reflow microlenses under the influence of surface tension and gravity

Andreas Schilling, R. Merz, Christian Ossmann, Hans Peter Herzig

OE, Vol. 39, Issue 08, (August 2000) https://doi.org/10.1117/12.10.1117/1.1304845

KEYWORDS: Microlens, Photoresist materials, Spherical lenses, Finite element methods, Photoresist processing, Liquids, Optical engineering, Photomasks, Partial differential equations, Fabrication

SPIE Journal Paper | 1 January 2000

Holographically recorded gratings on microlenses for a miniaturized spectrometer array

Silke Traut, Hans Peter Herzig

OE, Vol. 39, Issue 01, (January 2000) https://doi.org/10.1117/12.10.1117/1.602359

KEYWORDS: Microlens array, Microlens, Spectroscopy, Chemical elements, Holography, Diffraction gratings, Photoresist materials, Optical components, Ray tracing, Coating

Proceedings Article | 2 September 1999 Paper

Miniaturized time-scanning Fourier Transform Spectrometer based on silicon technology

Omar Manzardo, Hans Peter Herzig, Cornel Marxer, Nico de Rooij

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361276

KEYWORDS: Mirrors, Fourier transforms, Actuators, Spectroscopy, Silicon, Michelson interferometers, Modulation, Fourier spectroscopy, Beam splitters, Helium neon lasers

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Proceedings Article | 31 August 1999 Paper

Potential of dry etching for the fabrication of fused silica micro-optical elements

Philippe Nussbaum, Kenneth Weible, Markus Rossi, Hans Peter Herzig

Proceedings Volume 3879, (1999) https://doi.org/10.1117/12.360533

KEYWORDS: Silica, Etching, Photoresist materials, Microlens, Dry etching, Optical spheres, Reactive ion etching, Plasma, Glasses, Aspheric lenses

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Proceedings Article | 19 July 1999 Paper

Miniaturized time-scanning Fourier transform spectrometer using an electrostatic actuator

Omar Manzardo, Cornel Marxer, Hans Peter Herzig

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.354842

KEYWORDS: Mirrors, Actuators, Spectroscopy, Fourier transforms, Michelson interferometers, Sensors, Silicon, Wafer-level optics, Helium neon lasers, Beam splitters

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Proceedings Article | 19 July 1999 Paper

Achromatization of the diffraction efficiency of diffractive optical elements

Kenneth Weible, Andreas Schilling, Hans Peter Herzig, Daniel Lobb

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.354794

KEYWORDS: Diffractive optical elements, Diffraction, Interfaces, Tolerancing, Glasses, Reflection, Refraction, Laser ablation, Microtechnology, Chromatic aberrations

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Proceedings Article | 19 July 1999 Paper

Imaging of (sub-) wavelength sized objects

Rene Daendliker, Peter Blattner, Hans Peter Herzig

Proceedings Volume 3749, (1999) https://doi.org/10.1117/12.354963

KEYWORDS: Near field optics, Diffraction, Near field scanning optical microscopy, Spatial frequencies, Optical resolution, Optical components, Diffraction gratings, Super resolution, Objectives, Optical microscopes

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SPIE Journal Paper | 1 April 1999

Pulsed fiber laser using micro-electro-mechanical mirrors

Yves-Alain Peter, Hans Peter Herzig, Etienne Rochat, Rene Daendliker, Cornel Marxer, Nico de Rooij

OE, Vol. 38, Issue 04, (April 1999) https://doi.org/10.1117/12.10.1117/1.602107

KEYWORDS: Mirrors, Micromirrors, Pulsed fiber lasers, Fiber lasers, Switching, Modulation, Reflectivity, Scanning electron microscopy, Optical simulations, Modulators

Proceedings Article | 10 March 1999 Paper

Optical fiber switching device with active alignment

Yves-Alain Peter, Hans Peter Herzig, Stefano Bottinelli

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341275

KEYWORDS: Optical fibers, Optical alignment, Microlens, Optical switching, Switches, Optical components, Switching, Microopto electromechanical systems, Single mode fibers, Mirrors

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Proceedings Article | 20 October 1998 Paper

Design methods for illumination light pipes

Juan Teijido, Hans Peter Herzig, Claude Fuhrer, Pierre-Jean Erard

Proceedings Volume 3428, (1998) https://doi.org/10.1117/12.327967

KEYWORDS: Scattering, Light scattering, Computer aided design, Light sources, Light sources and illumination, Absorption, Computer simulations, Ray tracing, Illumination engineering, Optics manufacturing

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Proceedings Article | 13 October 1998 Paper

Scanning near-field optical microscopy: transfer function and resolution limit

Peter Blattner, Peter Kipfer, Hans Peter Herzig, Rene Daendliker

Proceedings Volume 3467, (1998) https://doi.org/10.1117/12.326824

KEYWORDS: Near field scanning optical microscopy, Free space, Optical microscopy, Optical components, Sensors, Near field optics, Wave propagation, Optical design, Spatial frequencies, Optical resolution

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Proceedings Article | 7 September 1998 Paper

Optical microsystems for imaging

Reinhard Voelkel, Christian Ossmann, Toralf Scharf, Hans Peter Herzig, Rene Daendliker

Proceedings Volume 3410, (1998) https://doi.org/10.1117/12.324016

KEYWORDS: Eye, Sensors, Lenses, Moire patterns, Imaging systems, Microlens array, Diffraction, Receptors, Telescopes, Micro optics

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Proceedings Article | 2 September 1998 Paper

XY-stage for alignment of optical elements in MOEMS

Yves-Alain Peter, Hans Peter Herzig, Stefano Bottinelli

Proceedings Volume 3513, (1998) https://doi.org/10.1117/12.324279

KEYWORDS: Optical fibers, Optical alignment, Microlens, Optical components, Microopto electromechanical systems, Switches, Single mode fibers, Quartz, Optical switching, Networks

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SPIE Journal Paper | 1 June 1998

Simple technique for replication of micro-optical elements

Philippe Nussbaum, Irene Philipoussis, Aline Husser, Hans Peter Herzig

OE, Vol. 37, Issue 06, (June 1998) https://doi.org/10.1117/12.10.1117/1.601799

KEYWORDS: Microlens, Adhesives, Diffraction gratings, Optical components, Diffraction, Optical spheres, Microlens array, Photoresist materials, Refractive index, Interferometers

Proceedings Article | 22 May 1998 Paper

Miniaturized focusing fan-out elements: design, fabrication, and characterization

Andreas Schilling, Philippe Nussbaum, Christian Ossmann, Silke Traut, Markus Rossi, Helmut Schift, Hans Peter Herzig

Proceedings Volume 3490, (1998) https://doi.org/10.1117/12.308971

KEYWORDS: Photoresist materials, Microlens, Fluctuations and noise, Optical components, Diffraction, Diffraction gratings, Microlens array, Optical alignment, Multiphoton lithography, Staring arrays

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Proceedings Article | 24 September 1997 Paper

Design, fabrication, and testing of micro-optical components for sensors and microsystems

Reinhard Voelkel, Philippe Nussbaum, Jean-Christophe Roulet, Peter Blattner, Kenneth Weible, Hans Peter Herzig

Proceedings Volume 3099, (1997) https://doi.org/10.1117/12.281227

KEYWORDS: Microlens, Microlens array, Photomasks, Lenses, Silica, Reactive ion etching, Photoresist materials, Sensors, Geometrical optics, Imaging systems

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Proceedings Article | 2 September 1997 Paper

Refractive and diffractive elements for micro-optical systems

Philippe Nussbaum, Hans Peter Herzig

Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284572

KEYWORDS: Fabrication, Reactive ion etching, Optical components, Interferometry, Optical resolution, Photoresist materials, Glasses, Quartz, Polymers, Optoelectronics

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Proceedings Article | 2 September 1997 Paper

Micro-opto-mechanical systems: applications in pulsed fiber lasers and optical switching

Yves-Alain Peter, Etienne Rochat, Hans Peter Herzig

Proceedings Volume 3226, (1997) https://doi.org/10.1117/12.284558

KEYWORDS: Optical switching, Pulsed fiber lasers, Microopto electromechanical systems, Micromirrors, Q switched fiber lasers, Switching, Optical simulations, Pulsed laser operation, Switches, Telecommunications

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Proceedings Article | 20 December 1996 Paper

Illumination light pipe using micro-optics as diffuser

Juan Teijido, Hans Peter Herzig, Rene Daendliker, Joachim Grupp

Proceedings Volume 2951, (1996) https://doi.org/10.1117/12.262413

KEYWORDS: Diffusers, Light scattering, Scattering, Diffraction gratings, Prisms, Reflection, Micro optics, Diffraction, Specular reflections, Optical properties

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SPIE Journal Paper | 1 November 1996

Microlens array imaging system for photolithography

Reinhard Voelkel, Hans Peter Herzig, Philippe Nussbaum, Rene Daendliker, William Hugle

OE, Vol. 35, Issue 11, (November 1996) https://doi.org/10.1117/12.10.1117/1.601080

KEYWORDS: Imaging systems, Microlens array, Lithography, Image resolution, Microlens, Wavefronts, Printing, Imaging arrays, Optical lithography, Modulation transfer functions

SPIE Journal Paper | 1 October 1996

Diffractive beamshaping elements at the fabrication limit

Wolfgang Singer, Hans Peter Herzig, Markku Kuittinen, Eckhard Piper, Johannes Wangler

OE, Vol. 35, Issue 10, (October 1996) https://doi.org/10.1117/12.10.1117/1.600960

KEYWORDS: Binary data, Etching, Diffraction, Lenses, Zone plates, Optical components, Fourier transforms, Convolution, Optical engineering, Error analysis

Proceedings Article | 18 September 1996 Paper

Optical testing of fine grating structures

Peter Blattner, Hans Peter Herzig

Proceedings Volume 2782, (1996) https://doi.org/10.1117/12.250793

KEYWORDS: Diffraction gratings, Optical testing, Optical fabrication, Nondestructive evaluation, Diffraction

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Proceedings Article | 26 August 1996 Paper

Micro-optics for sensor applications

Philippe Nussbaum, Reinhard Voelkel, Hans Peter Herzig, Rene Daendliker

Proceedings Volume 2783, (1996) https://doi.org/10.1117/12.248510

KEYWORDS: Microlens array, Microlens, Sensors, Silica, Lenses, Lithography, Reactive ion etching, Spherical lenses, Photomasks, Photoresist materials

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Proceedings Article | 23 August 1996 Paper

Design of a nonconventional illumination system using a scattering light pipe

Juan Teijido, Hans Peter Herzig, Rene Daendliker, Joachim Grupp, Jean-Charles Poli

Proceedings Volume 2774, (1996) https://doi.org/10.1117/12.246722

KEYWORDS: Light scattering, Scattering, Reflectivity, Light emitting diodes, Polymethylmethacrylate, Sensors, Light, Polishing, Interfaces, Specular reflections

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SPIE Journal Paper | 1 December 1995

Continuous-relief fan-out elements with optimized fabrication tolerances

Peter Ehbets, Markus Rossi, Hans Peter Herzig

OE, Vol. 34, Issue 12, (December 1995) https://doi.org/10.1117/12.10.1117/12.215507

KEYWORDS: Diffraction, Chemical elements, Tolerancing, Computer generated holography, Error analysis, Transition metals, Convolution, Transmittance, Point spread functions, Solids

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SPIE Journal Paper | 1 August 1995

Scanning spot metrology for testing of photolithographic masks

Peter Blattner, Hans Peter Herzig, S. Sohail Naqvi

OE, Vol. 34, Issue 08, (August 1995) https://doi.org/10.1117/12.10.1117/12.205667

KEYWORDS: Metrology, Signal detection, Nondestructive evaluation, Opacity, Detection and tracking algorithms, Sensors, Modulation

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SPIE Journal Paper | 1 August 1995

High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithography

Peter Ehbets, Hans Peter Herzig, Markku Kuittinen, Francis Clube, Yves Darbellay

OE, Vol. 34, Issue 08, (August 1995) https://doi.org/10.1117/12.10.1117/12.205661

KEYWORDS: Reflection, Holography, Lithography, Binary data, Diffractive optical elements, Volume holography, Holograms, Printing, Photoresist materials

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Proceedings Article | 30 September 1994 Paper

Diffractive optical elements for space communication terminals

Hans Peter Herzig, Peter Ehbets, Juan Teijido, Kenneth Weible, Hans-Joerg Heimbeck

Proceedings Volume 2210, (1994) https://doi.org/10.1117/12.188071

KEYWORDS: Optical components, Sensors, Diffractive optical elements, Beam shaping, Beam splitters, Receivers, Diffraction, Chemical elements, Glasses, Collimation

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SPIE Journal Paper | 1 February 1994

Total internal reflection holography for optical interconnections

Damien Prongue, Hans Peter Herzig

OE, Vol. 33, Issue 02, (February 1994) https://doi.org/10.1117/12.10.1117/12.153167

KEYWORDS: Holography, Holographic optical elements, Diffraction, Holograms, Photomasks, Spherical lenses, Very large scale integration, Near field, Optical components, Optical interconnects

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Proceedings Article | 12 July 1993 Paper

Continuous surface-relief gratings for two-dimensional array generation

Peter Ehbets, Hans Peter Herzig, D. Prongue, Michael Gale

Proceedings Volume 1806, (1993) https://doi.org/10.1117/12.147830

KEYWORDS: Chemical elements, Optical computing, Photoresist materials, Diffraction, Intermodulation, Diffraction gratings, Laser systems engineering, Raster graphics, Spatial frequencies, Phase shift keying

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Proceedings Article | 2 March 1993 Paper

Fabrication of 2D continuous-relief diffractive optical elements

Michael Gale, Markus Rossi, Helmut Schuetz, Peter Ehbets, Hans Peter Herzig, Juan Teijido

Proceedings Volume 1732, (1993) https://doi.org/10.1117/12.140448

KEYWORDS: Diffractive optical elements, Photoresist materials, Epoxies, Holography, Diffraction, Nickel, Laser systems engineering, Raster graphics, Control systems, Electroplating

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Proceedings Article | 5 January 1993 Paper

Design and fabrication of diffractive optical elements for beam shaping and imaging

Hans Peter Herzig, Rene Daendliker

Proceedings Volume 1718, (1993) https://doi.org/10.1117/12.138558

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Proceedings Article | 1 September 1991 Paper

Fan-out elements by multiple-beam recording in volume holograms

Hans Peter Herzig, Peter Ehbets, Juan Teijido, Rene Daendliker

Proceedings Volume 1507, (1991) https://doi.org/10.1117/12.47047

KEYWORDS: Holograms, Signal to noise ratio, Holography, Intermodulation, Diffraction gratings, Volume holography, Diffraction, Modulation, Phase shift keying, Holographic materials

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Proceedings Article | 1 August 1990 Paper

HOE for clock distribution in integrated circuits: experimental results

D. Prongue, Hans Peter Herzig

Proceedings Volume 1281, (1990) https://doi.org/10.1117/12.20685

KEYWORDS: Holographic optical elements, Diffraction, Holography, Clocks, Optical interconnects, Holograms, Optical networks, Integrated circuits, Near field, Photomasks

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Showing 5 of 117 publications

Proceedings Volume Editor (4)

SPIE Conference Volume | 3 November 2003

Lithographic and Micromachining Techniques for Optical Component Fabrication II

SPIE Conference Volume | 9 November 2001

Lithographic and Micromachining Techniques for Optical Component Fabrication

SPIE Conference Volume | 2 September 1998

Microelectronic Structures and MEMS for Optical Processing IV

SPIE Conference Volume | 2 September 1997

Microelectronic Structures and MEMS for Optical Processing III

Conference Committee Involvement (26)

Computational Optics 2024

10 April 2024 | Strasbourg, France

3D Printed Optics and Additive Photonic Manufacturing IV

8 April 2024 | Strasbourg, France

3D Printed Optics and Additive Photonic Manufacturing III

4 April 2022 | Strasbourg, France

Computational Optics 2021

13 September 2021 | Online Only, Spain

Digital Optical Technologies 2021

21 June 2021 | Online Only, Germany

3D Printed Optics and Additive Photonic Manufacturing II

7 April 2020 | Online Only, France

Digital Optical Technologies II

24 June 2019 | Munich, Germany

Computational Optics 2018

16 May 2018 | Frankfurt, Germany

Digital Optics for Immersive Displays (DOID18)

24 April 2018 | Strasbourg, France

3D Printed Optics and Additive Photonic Manufacturing

23 April 2018 | Strasbourg, France

Digital Optical Technologies

26 June 2017 | Munich, Germany

Computational Optics

7 September 2015 | Jena, Germany

Physical Optics II

28 November 2012 | Barcelona, Spain

Physical Optics

5 September 2011 | Marseille, France

SPIE Eco-Photonics 2011: Sustainable Design, Manufacturing, and Engineering Workforce Education for a Green Future

28 March 2011 | Strasbourg, France

The Role of Photonics in Sustainable Product Design

28 March 2011 | Strasbourg, France

Optical Micro- and Nanometrology

13 April 2010 | Brussels, Belgium

MEMS, MOEMS, and Micromachining II

3 April 2006 | Strasbourg, France

MEMS, MOEMS, and Micromachining

29 April 2004 | Strasbourg, France

MOEMS and Miniaturized Systems IV

27 January 2004 | San Jose, California, United States

Gradient Index, Miniature, and Diffractive Optical Systems III

6 August 2003 | San Diego, California, United States

Lithographic and Micromachining Techniques for Optical Component Fabrication II

3 August 2003 | San Diego, California, United States

MOEMS and Miniaturized Systems III

27 January 2003 | San Jose, CA, United States

Lithographic and Micromachining Techniques for Optical Component Fabrication

29 July 2001 | San Diego, CA, United States

Microelectronic Structures and MEMS for Optical Processing IV

21 September 1998 | Santa Clara, CA, United States

Microelectronic Structures and MEMS for Optical Processing III

29 September 1997 | Austin, TX, United States

Showing 5 of 26 Conference Committees

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