Prof. Hao-Chih Liu
Assistant Professor at National Cheng Kung Univ
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 9 April 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Atomic force microscopy, Silicon, Critical dimension metrology, Metrology, Self-assembled monolayers, Scanning electron microscopy, Distance measurement, Lithography, Head

Proceedings Article | 22 March 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Transmission electron microscopy, Atomic force microscopy, Error analysis, Calibration, Image restoration, Photomicroscopy, Scanners, Metrology, Critical dimension metrology, Reconstruction algorithms

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Transmission electron microscopy, Atomic force microscopy, Critical dimension metrology, Image restoration, Metrology, Photomicroscopy, Calibration, Reconstruction algorithms, Feature extraction, Image processing

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Atomic force microscopy, Metrology, System on a chip, Transmission electron microscopy, Silicon, Critical dimension metrology, Carbon nanotubes, Scanning probe microscopy, Zoom lenses, 3D modeling

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Atomic force microscopy, Critical dimension metrology, Image restoration, Transmission electron microscopy, Photomicroscopy, Silicon, Scanning electron microscopy, Metrology, Extreme ultraviolet, Calibration

Showing 5 of 6 publications
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