Dr. Hao-Tien Daniel Lee
Vice President
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 19 April 2013 Paper
Proc. SPIE. 8692, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2013
KEYWORDS: Microelectromechanical systems, Spindles, Solar energy, Sensors, Ions, Computing systems, Signal processing, Sensing systems, Electromagnetism, Inductance

Proceedings Article | 7 June 1996 Paper
Proc. SPIE. 2726, Optical Microlithography IX
KEYWORDS: Oxides, Lithography, Capacitors, Etching, Electrodes, Silicon, Photoresist materials, Photomasks, Double patterning technology, Phase shifts

Proceedings Article | 9 June 1995 Paper
Proc. SPIE. 2438, Advances in Resist Technology and Processing XII
KEYWORDS: Diffractive optical elements, Tungsten, Silicon, Photography, Manufacturing, Scanning electron microscopy, Photoresist materials, Head-mounted displays, Semiconducting wafers, Photoresist developing

Proceedings Article | 26 May 1995 Paper
Proc. SPIE. 2440, Optical/Laser Microlithography VIII
KEYWORDS: Lithography, Optical microscopes, Sensors, Metals, Image processing, Inspection, Control systems, Scanning electron microscopy, Aluminum, Semiconducting wafers

Proceedings Article | 17 May 1994 Paper
Proc. SPIE. 2197, Optical/Laser Microlithography VII
KEYWORDS: Signal to noise ratio, Thin films, Diffractive optical elements, Metals, Silicon, Scanning electron microscopy, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Tin

Showing 5 of 9 publications
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