Mr. Hao Li Profile

Hao Li

at Louisiana Tech Univ

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Author

Publications (3)

Proceedings Article | 3 May 2007 Paper

Generation of silicon nanowires using a new thinning and trimming method

Hui Wang, Anirban Chakraborty, Xinchuan Liu, Hao Li, Cheng Luo

Proceedings Volume 6556, 65561P (2007) https://doi.org/10.1117/12.721230

KEYWORDS: Silicon, Oxides, Etching, Interfaces, Lithography, Deep reactive ion etching, Oxygen, Semiconducting wafers, Oxidation, Nanowires

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Proceedings Article | 3 May 2007 Paper

Deflection of silicon dioxide microbridge under distributed load

Hao Li, Anirban Chakraborty, Xinchuan Liu, Hui Wang, Cheng Luo

Proceedings Volume 6556, 655608 (2007) https://doi.org/10.1117/12.721275

KEYWORDS: Bridges, Silica, Sensors, Silicon, Etching, Molecular bridges, Semiconducting wafers, Plasma etching, Nickel, Lithium

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Proceedings Article | 18 May 2006 Paper

Theoretical and numerical studies of new suspended-silicon-nanowire-based static sensors

Hao Li, Xinchuan Liu, Cheng Luo

Proceedings Volume 6223, 62230Q (2006) https://doi.org/10.1117/12.666432

KEYWORDS: Sensors, Quantum wells, Molecules, Adsorption, Silicon, Chemical elements, Microfabrication, Logic devices, Microelectromechanical systems, Nanowires

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