Hao Li
at Louisiana Tech Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 3 May 2007 Paper
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Bridges, Silica, Sensors, Silicon, Etching, Molecular bridges, Semiconducting wafers, Plasma etching, Nickel, Lithium

Proceedings Article | 3 May 2007 Paper
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Silicon, Oxides, Etching, Interfaces, Lithography, Deep reactive ion etching, Oxygen, Semiconducting wafers, Oxidation, Nanowires

Proceedings Article | 18 May 2006 Paper
Proc. SPIE. 6223, Micro (MEMS) and Nanotechnologies for Space Applications
KEYWORDS: Sensors, Quantum wells, Molecules, Adsorption, Silicon, Chemical elements, Microfabrication, Logic devices, Microelectromechanical systems, Nanowires

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