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Hao Liu
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Publications (2)
Proceedings Article | 19 November 2021 Presentation + Paper
In-situ cleaning organic contaminants on SiO2 sol-gel antireflection film by low-pressure air plasma
Yuhai Li, Qingshun Bai, Rongqi Shen, Peng Zhang, Lihua Lu, Xiaodong Yuan, Xinxiang Miao, Wei Han, Hao Liu, Lin Huang, Caizhen Yao
Proceedings Volume 11910, 1191017 (2021) https://doi.org/10.1117/12.2599668
KEYWORDS: Plasma, Sol-gels, Optical components, Transmittance, Oxygen, Contamination, Natural surfaces, Chemical reactions, Antireflective coatings, Carbon
Proceedings Article | 12 May 2017 Paper
Cleaning mechanism of particle contaminants on large aperture optical components by using air knife sweeping technology
Longfei Niu, Hao Liu, Xinxiang Miao, Haibing Lv, Xiaodong Yuan, Hai Zhou, Caizhen Yao, Guorui Zhou, Qin Li
Proceedings Volume 10173, 1017323 (2017) https://doi.org/10.1117/12.2267980
KEYWORDS: Particles, Optical components, High power lasers, Optical simulations
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