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Hao Qu
at Univ of Electronic Science and Technology of China
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Publications (1)
SPIE Journal Paper | 19 August 2017
Attenuation of the dielectric charging-induced drift in capacitive accelerometer by AC bias voltage
Hao Qu, Huijun Yu, Bei Peng, Peng Peng, Hao Wang, Xiaoping He, Wu Zhou
JM3, Vol. 16, Issue 03, 035002, (August 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.3.035002
KEYWORDS: Dielectrics, Structural sensing, Signal attenuation, Information operations, Signal processing, Electrodes, Sensing systems, Magnesium, Microelectromechanical systems, Temperature metrology
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