Mr. Hao Zhang Profile

Hao Zhang

President at Holon Co., Ltd.

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Publications (3)

Proceedings Article | 4 October 2016 Paper

The CD control improvement by using CDSEM 2D measurement of complex OPC patterns

William Chou, Jeffrey Cheng, Adder Lee, James Cheng, Alex Tzeng, Colbert Lu, Ray Yang, Hong Jen Lee, Hideaki Bandoh, Izumi Santo, Hao Zhang, Chien Kang Chen

Proceedings Volume 9985, 99851M (2016) https://doi.org/10.1117/12.2241326

KEYWORDS: Photomasks, Critical dimension metrology, Optical proximity correction, Scanning electron microscopy, Semiconducting wafers, Manufacturing, Holons, Lithography, Edge roughness, Source mask optimization

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Proceedings Article | 17 October 2008 Paper

Auto-classification and simulation of mask defects using SEM and CAD images

Tung-Yaw Kang, Hsin-Chang Lee, H. Zhang, K. Yamada, Y. Kitayama, K. Kobayashi, Peter Fiekowsky

Proceedings Volume 7122, 71221F (2008) https://doi.org/10.1117/12.801411

KEYWORDS: Inspection, Photomasks, Scanning electron microscopy, Computer aided design, Semiconducting wafers, Printing, Defect detection, Defect inspection, Holons, Lithography

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Proceedings Article | 16 November 2007 Paper

New method of identification of false or nuisance defects using defect imaging system DIS-05

Hao Zhang, Katsuyuki Takahashi, Hideaki Bando, Yasunobu Kitayama, Akio Sugano, Kenichi Kobayashi

Proceedings Volume 6730, 67303M (2007) https://doi.org/10.1117/12.746667

KEYWORDS: Inspection, Computer aided design, Scanning electron microscopy, Photomasks, Imaging systems, Holons, Defect inspection, Defect detection, Image resolution, Infrared imaging

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