Haoyuan Zhao
at North China Univ. of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: CMOS sensors, Fringe analysis, Wavelet transforms, Optical sensors, Cameras, Calibration, Fourier transforms, Computer programming, Digital imaging, Optical encoders

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