CONFERENCE PROCEEDINGS
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Harlan F. Chung
Sr Process Engineer
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 5 November 2005 Paper
Characterization of photomask surface cleaning with cryogenic aerosol technique
S. Banerjee, C.C. Lin, S. Su, C. Bowers, H.F. Chung, W. Brandt, K. Tang
Proceedings Volume 5992, 59921H (2005) https://doi.org/10.1117/12.632226
KEYWORDS: Particles, Cryogenics, Carbon monoxide, Atmospheric particles, Photomasks, Semiconducting wafers, Aerosols, Silicon, Inspection, Air contamination
Proceedings Article | 28 June 2005 Paper
Cryogenic aerosol cleaning of photomasks
S. Banerjee, C. Lin, S. Su, H. Chung, W. Brandt, K. Tang
Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617081
KEYWORDS: Particles, Atmospheric particles, Cryogenics, Photomasks, Aerosols, Semiconducting wafers, Carbon dioxide, Silicon, Atmospheric modeling, Air contamination
Proceedings Article | 10 January 1997 Paper
Visible laser diodes for printing
David Bour, Ross Bringans, Harlan Chung, David Treat, Werner Goetz, Daniel Hofstetter, Noble Johnson
Proceedings Volume 3000, (1997) https://doi.org/10.1117/12.263491
KEYWORDS: Quantum wells, Semiconductor lasers, Nonimpact printing, Light emitting diodes, Printing, Heterojunctions, Gallium nitride, Cladding, Indium gallium nitride, Optical pumping
Proceedings Article | 1 May 1990 Paper
Recent developments in surface-emitting distributed-feedback arrays
Steven Macomber, Jeffrey Mott, Harlan Chung, Thomas Paoli
Proceedings Volume 1219, (1990) https://doi.org/10.1117/12.18259
KEYWORDS: Gold, Laser applications, Continuous wave operation, Silicon, Fabry–Perot interferometers, Resistance, Coating, Copper, Crystals
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