Mr. Harold D. Stewart Profile

Harold D. Stewart

Department Manager at Sandia National Labs

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 30 August 1999 Paper

Reproducibility data on SUMMiT

Siv Limary, Harold Stewart, Lloyd Irwin, John McBrayer, Jeffry Sniegowski, Stephen Montague, James Smith, Maarten de Boer, Jerome Jakubczak

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361210

KEYWORDS: Resistance, Semiconducting wafers, Oxides, Microelectromechanical systems, Etching, Silicon, Scanning electron microscopy, Diagnostics, Computer aided design, Standards development

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Proceedings Volume Editor (3)

SPIE Conference Volume | 8 February 2007

Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII

SPIE Conference Volume | 21 January 2006

Micromachining and Microfabrication Process Technology XI

SPIE Conference Volume | 22 January 2005

Micromachining and Microfabrication Process Technology X

Conference Committee Involvement (3)

Micromachining and Microfabrication Process Technology XII

22 January 2007 | San Jose, California, United States

Micromachining and Microfabrication Process Technology XI

25 January 2006 | San Jose, California, United States

Micromachining and Microfabrication Process Technology X

25 January 2005 | San Jose, California, United States

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