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Haruko Akutsu
at Toshiba Materials Co Ltd
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Publications (1)
Proceedings Article | 19 May 2008 Paper
Novel model of haze generation on photomask
Haruko Akutsu, Shinji Yamaguchi, Kyo Otsubo, Makiko Tamaoki, Ayako Shimazaki, Reiko Yoshimura, Fumihiko Aiga, Tsukasa Tada
Proceedings Volume 7028, 702829 (2008) https://doi.org/10.1117/12.793083
KEYWORDS: Air contamination, Photomasks, Raman spectroscopy, Molybdenum, Particles, Chemical analysis, Quartz, Ions, Testing and analysis, Scanning electron microscopy
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