Dr. Harutaka Mekaru
at AIST
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: X-rays, Photomasks, Polymethylmethacrylate, X-ray lithography, Silicon, Scanning electron microscopy, X-ray technology, Nickel, X-ray imaging, Self-assembled monolayers

Proceedings Article | 9 January 2008 Paper
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Polymethylmethacrylate, Etching, X-rays, Nickel, Silicon, Scanning electron microscopy, Photomasks, Photoresist processing, X-ray lithography, X-ray technology

SPIE Journal Paper | 1 January 2008
JM3 Vol. 7 Issue 01

Proceedings Article | 21 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Microelectromechanical systems, Polymethylmethacrylate, Etching, X-rays, Silicon, Scanning electron microscopy, Photomasks, X-ray imaging, X-ray lithography, X-ray technology

Proceedings Article | 13 June 2006 Paper
Proc. SPIE. 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
KEYWORDS: Microelectromechanical systems, Wafer-level optics, Oxides, Mirrors, X-ray optics, Etching, X-rays, Silicon, Semiconducting wafers, Optics manufacturing

Showing 5 of 6 publications
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