Dr. Heinz-Ulrich Scheunemann Profile

Dr. Heinz-Ulrich Scheunemann

at BESSY GmbH

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 2 May 2008 Paper

Anja Voigt, Josef Kouba, Marina Heinrich, Gabi Gruetzner, Heinz-Ulrich Scheunemann, I. Rudolph, Christoph Waberski

Proceedings Volume 6792, 679214 (2008) https://doi.org/10.1117/12.798802

KEYWORDS: X-rays, Photomasks, Carbon, Vitreous, Gold, Ultraviolet radiation, X-ray lithography, Electroplating, Beryllium, Photoresist materials

Proceedings Article | 24 April 2003 Paper

Heinz-Ulrich Scheunemann, Bernd Loechel, Linke Jian, Daniel Schondelmaier, Yohannes Desta, Jost Goettert

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.498986

KEYWORDS: Photomasks, X-rays, X-ray lithography, Carbon, Silicon carbide, Beryllium, Transparency, Silicon, Polishing, Glasses

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