Mr. Helmut Bernitzki Profile

Helmut Bernitzki

Senior Expert Coatings at JENOPTIK Optical Systems GmbH

SPIE Involvement:

Author

Publications (16)

Proceedings Article | 18 December 2012 Paper

Improving laser material processing objective lenses towards better utilization of high brilliance light sources

Lutz Reichmann, Hans-Jürgen Feige, Jürgen Finster, Matthias Bening, Jörg Wunderlich, Peter Triebel, Helmut Bernitzki, Uwe Schuhmann

Proceedings Volume 8550, 85500I (2012) https://doi.org/10.1117/12.981341

KEYWORDS: Absorption, Coating, Thermal effects, Finite element methods, Objectives, Lenses, Glasses, Silica, Laser processing, Refractive index

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Proceedings Article | 28 November 2011 Paper

Comparative study of fused silica materials for ArF laser applications

Ch. Mühlig, S. Bublitz, H. Bernitzki

Proceedings Volume 8190, 81901Q (2011) https://doi.org/10.1117/12.899063

KEYWORDS: Absorption, Silica, Refractive index, Laser irradiation, Laser induced fluorescence, Laser induced damage, Laser applications, Phase measurement, Interferometers, Luminescence

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Proceedings Article | 25 September 2008 Paper

Metal fluoride coatings prepared by ion-assisted deposition

Martin Bischoff, Maik Sode, Dieter Gäbler, Helmut Bernitzki, Christoph Zaczek, Norbert Kaiser, Andreas Tünnermann

Proceedings Volume 7101, 71010L (2008) https://doi.org/10.1117/12.797422

KEYWORDS: Metals, Thin films, Magnesium fluoride, Absorption, Refractive index, Ions, Fluorine, Photometry, Deposition processes, Surface roughness

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Proceedings Article | 25 September 2008 Paper

Low-loss HR coatings on fused silica substrates for 193 nm micro-lithography applications

Sven Laux, Helmut Bernitzki, Dieter Fasold, Michael Klaus, Uwe Schuhmann

Proceedings Volume 7101, 71010Y (2008) https://doi.org/10.1117/12.797820

KEYWORDS: Optical coatings, Reflectivity, Silica, Absorption, Oxides, Laser applications, Light scattering, Multilayers, Excimer lasers, Metals

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Proceedings Article | 15 January 2007 Paper

Direct measurements of residual absorption in fluoridic thin films and optical materials for DUV laser applications

Ch. Mühlig, W. Triebel, S. Kufert, Ch. Noppeney, H. Bernitzki

Proceedings Volume 6403, 640317 (2007) https://doi.org/10.1117/12.695438

KEYWORDS: Absorption, Laser induced damage, Laser beam diagnostics, Light scattering, Calibration, Silica, Laser scattering, Optical coatings, Scattering, Laser irradiation

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Proceedings Article | 9 June 2006 Paper

Manufacturing of high-precision aspheres

Uwe Birnbaum, Helmut Bernitzki, Oliver Falkenstörfer, Hans Lauth, Roland Schreiner, Thomas Waak

Proceedings Volume 6149, 61490H (2006) https://doi.org/10.1117/12.674204

KEYWORDS: Aspheric lenses, Optical spheres, Computer generated holography, Polishing, Manufacturing, Interferometers, Surface finishing, Spherical lenses, Optics manufacturing, Mirrors

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Proceedings Article | 18 May 2006 Paper

Novel high-efficiency and cost-effective filters and windows for infrared detectors

E. Gittler, H. Bernitzki, H. Lauth, Th. Weyh

Proceedings Volume 6206, 62062T (2006) https://doi.org/10.1117/12.664883

KEYWORDS: Optical filters, Sensors, Optical coatings, Infrared detectors, Optical filtering, Semiconducting wafers, Metals, Stray light, Chromium, Electronic filtering

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Proceedings Article | 5 October 2005 Paper

Thorium-free interference coatings for infrared applications

Sven Laux, Helmut Bernitzki, Dieter Fasold, Elvira Gittler, Frank Schmidt, Thomas Weyh, Gottfried Wurlitzer

Proceedings Volume 5963, 59631A (2005) https://doi.org/10.1117/12.625146

KEYWORDS: Beam splitters, Infrared radiation, Reflectivity, Antireflective coatings, Infrared coatings, Mirrors, Transmittance, Cements, Prisms, Optical coatings

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Proceedings Article | 5 October 2005 Paper

Absorption and fluorescence measurements of DUV/VUV coatings

Ch. Mühlig, W. Triebel, H. Bernitzki, M. Klaus, J. Bergmann, S. Kufert, S. Bublitz

Proceedings Volume 5963, 59630P (2005) https://doi.org/10.1117/12.625079

KEYWORDS: Absorption, Laser induced fluorescence, Mirrors, Laser induced damage, Luminescence, Praseodymium, Cerium, Laser irradiation, Thin films, Laser applications

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Proceedings Article | 25 February 2004 Paper

EUV and soft x-ray multilayer optics

Norbert Kaiser, Sergiy Yulin, Torsten Feigl, Helmut Bernitzki, Hans Lauth

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.512502

KEYWORDS: Reflectivity, Mirrors, Multilayers, X-rays, Extreme ultraviolet, X-ray optics, EUV optics, Silicon, Scandium, Transmission electron microscopy

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Proceedings Article | 1 July 2002 Paper

Design and fabrication of broadband EUV multilayer mirrors

Thomas Kuhlmann, Sergey Yulin, Torsten Feigl, Norbert Kaiser, Helmut Bernitzki, Hans Lauth

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472327

KEYWORDS: Mirrors, Reflectivity, Multilayers, Extreme ultraviolet, Plasma, Reflection, Stochastic processes, Molybdenum, Silicon, Sputter deposition

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Proceedings Article | 12 April 2001 Paper

Long-time radiation-resistant optical coatings for UV excimer laser applications

Sven Laux, Helmut Bernitzki, Michael Klaus, Hans Lauth, Norbert Kaiser

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425034

KEYWORDS: Coating, Ultraviolet radiation, Excimer lasers, Laser induced damage, Refractive index, Optical coatings, Laser damage threshold, Thin films, Plasma, Reflection

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Proceedings Article | 3 March 2000 Paper

Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers

Winfried Arens, Detlev Ristau, Jens Ullmann, Christoph Zaczek, Roland Thielsch, Norbert Kaiser, Angela Duparre, Oliver Apel, Klaus Mann, Hans Lauth, Helmut Bernitzki, Johanes Ebert, Stefan Schippel, H. Heyer

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379314

KEYWORDS: Absorption, Scattering, Deep ultraviolet, Optical components, Optical coatings, Laser damage threshold, Laser optics, Reflection, Thin film coatings, Reflectivity

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Proceedings Article | 3 March 2000 Paper

Coated optics for DUV excimer laser application

Jens Ullmann, Michael Mertin, Hans Lauth, Helmut Bernitzki, Klaus Mann, Detlev Ristau, Winfried Arens, Roland Thielsch, Norbert Kaiser

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379348

KEYWORDS: Coating, Absorption, Thin films, Scattering, Deep ultraviolet, Silica, Laser scattering, Laser damage threshold, Antireflective coatings, Resistance

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Proceedings Article | 7 April 1999 Paper

Coated optics for DUV excimer laser applications (Abstract Only)

Jens Ullmann, Michael Mertin, Hans Lauth, Helmut Bernitzki, Klaus Mann, Detlev Ristau, Winfried Arens, Roland Thielsch, Norbert Kaiser

Proceedings Volume 3578, (1999) https://doi.org/10.1117/12.344440

KEYWORDS: Deep ultraviolet, Excimer lasers, Laser optics, Laser applications, Absorption, Laser scattering, Scattering, Laser development, Reliability, Optical components

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Proceedings Article | 7 April 1999 Paper

Current status of radiation resistance of dielectric mirrors in the DUV

Helmut Bernitzki, Hans Lauth, Roland Thielsch, Holger Blaschke, Norbert Kaiser, Klaus Mann

Proceedings Volume 3578, (1999) https://doi.org/10.1117/12.344386

KEYWORDS: Mirrors, Resistance, Reflectivity, Dielectric mirrors, Oxides, Silica, Laser damage threshold, Deep ultraviolet, Laser induced damage, Mirror pointing

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Showing 5 of 16 publications

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