Prof. Hendrik Rothe Profile

Prof. Hendrik Rothe

Retired at Helmut-Schmidt-Univ

SPIE Involvement:

Author

Publications (95)

Proceedings Article | 24 August 2017 Paper

Paper

High-speed video analysis of ballistic trials to investigate the crack propagation in glass laminates

Arash Ramezani, Hendrik Rothe

Proc. SPIE. 10376, Novel Optical Systems Design and Optimization XX

KEYWORDS: Safety, Glasses, Image processing, Video, Numerical simulations, Numerical analysis, Optical simulations, Video processing, Computer aided design

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Proceedings Article | 24 August 2017 Presentation + Paper

Presentation + Paper

Gait motion analysis using optical and inertial sensor fusion to design human kinetic energy harvesting systems

Oliver Kröning, Hendrik Rothe

Proc. SPIE. 10376, Novel Optical Systems Design and Optimization XX

KEYWORDS: Mobile devices, Optical design, Energy harvesting, Optical tracking, Sensor fusion, Motion analysis, Gait analysis, Motion estimation

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Proceedings Article | 28 September 2016 Presentation + Paper

Presentation + Paper

Challenges in system design of an optronic, laser-based measurement system for projectile trajectories

Uwe Chalupka, Hendrik Rothe

Proc. SPIE. 9948, Novel Optical Systems Design and Optimization XIX

KEYWORDS: Weapons, Imaging systems, Lenses, Cameras, Sensors, Calibration, Image segmentation, Laser scattering, Image sensors, Prototyping

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Proceedings Article | 27 September 2016

Presentation + Paper

Optics and optronics in university courses for officers of the Federal Armed Forces - special curricula and hands-on lessons vs. academic requirements

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 9946, Optics Education and Outreach IV

KEYWORDS: MATLAB, Digital image processing, Mechanics, Sensors, Image processing, Video, Optoelectronics, Electrical engineering, Mechanical engineering, Mechatronics

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Proceedings Article | 9 September 2015 Paper

Paper

A quintuple of painful lessons from surface inspection to high-speed imaging

Cornelius Hahlweg, Hendrik Rothe, Cornelia Weyer

Proc. SPIE. 9583, An Optical Believe It or Not: Key Lessons Learned IV

KEYWORDS: Short wave infrared radiation, Diffraction, Optical filters, Visualization, Calibration, Lamps, Inspection, Black bodies, High speed imaging, Diffraction gratings

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Proceedings Article | 3 September 2015

Paper

Endoscopic system for automated high dynamic range inspection of moving periodic structures (Withdrawal Notice)

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 9579, Novel Optical Systems Design and Optimization XVIII

KEYWORDS: Endoscopy, Optical design, Inspection, High dynamic range imaging, Current controlled current source

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Proceedings Article | 30 September 2013 Paper

Paper

Visualization of sound generation: special imaging techniques

Cornelius Hahlweg, Daniel Skaloud, Holger Gutzmann, Sascha Kutz, Hendrik Rothe

Proc. SPIE. 8842, Novel Optical Systems Design and Optimization XVI

KEYWORDS: Neck, Photoelasticity, Optical spheres, Polarization, Visualization, Imaging systems, Glasses, Video, Video processing, Spherical lenses

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Proceedings Article | 30 September 2013 Paper

Paper

Perception of power modulation of light in conjunction with acoustic stimulation

Cornelius Hahlweg, Cornelia Weyer, Harald Gercke-Hahn, Holger Gutzmann, Andre Brahmann, Hendrik Rothe

Proc. SPIE. 8842, Novel Optical Systems Design and Optimization XVI

KEYWORDS: Light sources, Electronics, Light emitting diodes, Coherence (optics), Modulation, Lamps, Electroencephalography, Oscilloscopes, Acoustics, Occupational medicine

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Proceedings Article | 30 September 2013 Paper

Paper

Special high speed imaging techniques using phase, aperture, and polarization effects

Wenjing Zhao, Daniel Skaloud, Sascha Kutz, Hendrik Rothe, Cornelius Hahlweg

Proc. SPIE. 8842, Novel Optical Systems Design and Optimization XVI

KEYWORDS: Optical filters, Polarization, Visualization, Cameras, Glasses, Video, Lamps, Solids, Explosives, High speed imaging

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Proceedings Article | 30 September 2013 Paper

Paper

The unique sound of the uni-vibe pedal: Part II. Transient behaviour

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 8842, Novel Optical Systems Design and Optimization XVI

KEYWORDS: Optical design, Phase modulation, Modulation, Photoresistors, Resistance, Computing systems, Phase shift keying, Transform theory, Resistors, Systems modeling

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Proceedings Article | 30 September 2013 Paper

Paper

Applied paraxial methods and some philosophical questions

Cornelius Hahlweg, Wenjing Zhao, Joachim Doerfler, Hendrik Rothe

Proc. SPIE. 8842, Novel Optical Systems Design and Optimization XVI

KEYWORDS: Refractive index, Mirrors, Imaging systems, Sensors, Refraction, Geometrical optics, Fourier optics, Paraxial approximations, Electrical engineering, Spherical lenses

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Proceedings Article | 19 October 2012 Paper

Paper

The unique sound of the Univibe pedal

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 8487, Novel Optical Systems Design and Optimization XV

KEYWORDS: Electronics, Second-harmonic generation, Capacitors, Lamps, Phase shift keying, Distortion, Signal processing, Bridges, Resistors, Systems modeling

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Proceedings Article | 19 October 2012 Paper

Paper

Uranium glass in optics: historical review and current research

Cornelius Hahlweg, Wenjing Zhao, Hendrik Rothe

Proc. SPIE. 8487, Novel Optical Systems Design and Optimization XV

KEYWORDS: Lithium, Optical spheres, Scattering, Calibration, Glasses, Luminescence, Imaging devices, Scatterometry, Lanthanum, Fluorescent materials

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Proceedings Article | 15 October 2012 Paper

Paper

Design of combined microscopical and scatterometrical imaging device of surface inspection

Wenjing Zhao, Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 8495, Reflection, Scattering, and Diffraction from Surfaces III

KEYWORDS: Microscopes, Diffraction, Imaging systems, Spatial frequencies, Cameras, Inspection, Fourier transforms, Dielectrophoresis, Image sensors, Refractor telescopes

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Proceedings Article | 15 October 2012 Paper

Paper

Surface characterization using combined analysis of original and scatter image

Wenjing Zhao, Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 8495, Reflection, Scattering, and Diffraction from Surfaces III

KEYWORDS: Image fusion, Microscopes, Diffraction, Mirrors, Beam splitters, Imaging systems, Cameras, Image analysis, CMOS cameras, Diffraction gratings

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Proceedings Article | 15 October 2012 Paper

Paper

Backscatter based projectile trajectory measurement under daylight conditions

Uwe Chalupka, Hendrik Rothe

Proc. SPIE. 8495, Reflection, Scattering, and Diffraction from Surfaces III

KEYWORDS: Optical filters, Light sources, Sun, Backscatter, Cameras, Sensors, Image segmentation, Image resolution, Environmental sensing, Binary data

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Proceedings Article | 11 October 2012 Paper

Paper

Imaging of short time microscopic scenes with strong light emission: revisited

Cornelius Hahlweg, Wenjing Zhao, Hendrik Vogeler, Hendrik Rothe

Proc. SPIE. 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI

KEYWORDS: Mirrors, Optical properties, Imaging systems, Cameras, Image processing, CCD cameras, Scatterometry, High dynamic range imaging, Explosives, Camera shutters

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Proceedings Article | 30 January 2012 Paper

Paper

A stereoscopic imaging system for laser back scatter based trajectory measurement in ballistics: part 2

Uwe Chalupka, Hendrik Rothe

Proc. SPIE. 8290, Three-Dimensional Image Processing (3DIP) and Applications II

KEYWORDS: Weapons, Imaging systems, Cameras, Calibration, Stereoscopy, Image segmentation, Image processing, Computer simulations, Velocity measurements, Virtual colonoscopy

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Proceedings Article | 20 September 2011 Paper

Paper

Laser based imaging of time depending microscopic scenes with strong light emission

Cornelius Hahlweg, Eugen Wilhelm, Hendrik Rothe

Proc. SPIE. 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V

KEYWORDS: Diffraction, Telescopes, Optical filters, Doppler effect, Cameras, LIDAR, Signal attenuation, Video, High speed cameras, Explosives

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Proceedings Article | 20 September 2011 Paper

Paper

Verification of scatterometer design

Wenjing Zhao, Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V

KEYWORDS: Diffraction, Mirrors, Optical design, Metrology, Reflection, Imaging systems, Cameras, Data processing, Combined lens-mirror systems, Diffraction gratings

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Proceedings Article | 17 September 2011 Paper

Paper

Backscatter behaviour and tracking of ogive shaped objects in optical range

Uwe Chalupka, Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 8137, Signal and Data Processing of Small Targets 2011

KEYWORDS: Light sources, Nose, Optical spheres, Imaging systems, Cameras, Receivers, Computer simulations, Collimation, Ray tracing, Optical tracking

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Proceedings Article | 17 September 2011 Paper

Paper

Fourier planes vs. Scheimpflug principle in microscopic and scatterometric devices

Cornelius Hahlweg, Wenjing Zhao, Hendrik Rothe

Proc. SPIE. 8127, Optical Modeling and Performance Predictions V

KEYWORDS: Microscopes, Diffraction, Mirrors, Imaging systems, Microscopy, Inspection, Fourier transforms, Imaging devices, Refractor telescopes, Off axis mirrors

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Proceedings Article | 17 September 2011 Paper

Paper

Lambert's multiple reflection model revisited

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 8127, Optical Modeling and Performance Predictions V

KEYWORDS: Diffraction, Reflection, Lenses, Matrices, Scatterometry, Refraction, Geometrical optics, Spherical lenses, Refractor telescopes, Systems modeling

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Proceedings Article | 16 September 2011 Paper

Paper

German heat bearing devices during WW II: an overview

Margit Krake, Hendrik Rothe

Proc. SPIE. 8155, Infrared Sensors, Devices, and Applications; and Single Photon Imaging II

KEYWORDS: Bolometers, Semiconductors, Mirrors, Modulation, Amplifiers, Optoelectronic devices, Bridges, Measurement devices, Infrared radiation, Wheatstone bridges

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Proceedings Article | 2 September 2010 Paper

Paper

A stereoscopic imaging system for laser back-scatter-based trajectory measurement in ballistics

Eugen Wilhelm, Uwe Chalupka, Cornelius Hahlweg, Wenjing Zhao, Hendrik Rothe

Proc. SPIE. 7792, Reflection, Scattering, and Diffraction from Surfaces II

KEYWORDS: Weapons, Modulation, Imaging systems, Cameras, Sensors, Stereoscopy, Image segmentation, Error analysis, Optical simulations, Device simulation

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Proceedings Article | 2 September 2010 Paper

Paper

Design rules for catadioptric scatterometers based on measurement requirements

Wenjing Zhao, Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 7792, Reflection, Scattering, and Diffraction from Surfaces II

KEYWORDS: Diffraction, Optical filters, Mirrors, CMOS sensors, Reflection, Imaging systems, Data processing, Spatial resolution, Scatter measurement, Combined lens-mirror systems

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Proceedings Article | 2 September 2010 Paper

Paper

Time depending techniques for volume and discrete boundary surface scatterometry and part II of a lost chapter in Lambert's Photometria on multiple reflection

Cornelius Hahlweg, Burkhard Meißner, Wenjing Zhao, Hendrik Rothe

Proc. SPIE. 7792, Reflection, Scattering, and Diffraction from Surfaces II

KEYWORDS: Transmitters, Reflection, LIDAR, Laser scattering, Interferometry, Receivers, Scatterometry, Signal processing, Multiplexers, Refractor telescopes

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Proceedings Article | 2 September 2010 Paper

Paper

Investigations on back scatter of typical projectiles for application of laser based trajectory measurement

Wenjing Zhao, Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 7792, Reflection, Scattering, and Diffraction from Surfaces II

KEYWORDS: Polishing, Metrology, Optical spheres, Backscatter, Reflection, Imaging systems, Cameras, Image processing, Laser scattering, Surface finishing

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Proceedings Article | 20 August 2010 Paper

Paper

The idea of the Lambertian surface: history, idealization, and system theoretical aspects and part 1 of a lost chapter on multiple reflection

Cornelius Hahlweg, Burkhard Meißner, Wenjing Zhao, Hendrik Rothe

Proc. SPIE. 7792, Reflection, Scattering, and Diffraction from Surfaces II

KEYWORDS: Diffraction, Eye, Sun, Atrial fibrillation, Reflection, Reflectivity, Fourier transforms, Photometry, Refractor telescopes, Light

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Proceedings Article | 19 August 2010 Paper

Paper

German infrared and night vision technology: from the beginning until 1945

M. Krake, H. Rothe

Proc. SPIE. 7780, Detectors and Imaging Devices: Infrared, Focal Plane, Single Photon

KEYWORDS: Semiconductors, Infrared imaging, Electrodes, Metals, Electrons, Night vision, Infrared radiation, Infrared technology, Missiles, Photoelectric effect

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Proceedings Article | 21 August 2009 Paper

Paper

Spectral effects of AFM tip geometry

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III

KEYWORDS: Statistical analysis, Optical spheres, Spatial frequencies, Image processing, Atomic force microscopy, Image quality, Signal processing, Convolution, Spatial resolution, Spherical lenses

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Proceedings Article | 21 August 2009 Paper

Paper

Non-linear distortions caused by AFM-tip geometry and limitations of reconstruction on discrete data

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III

KEYWORDS: Fourier transforms, Inverse problems, Signal processing, Deconvolution, Mathematics, Convolution, Phase measurement, Signal analyzers, Spherical lenses, Systems modeling

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Proceedings Article | 12 August 2009 Paper

Paper

Macroscopical scatter and reflection behavior of convex bodies in free flight

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 7458, Remote Sensing System Engineering II

KEYWORDS: Mathematical modeling, Optical spheres, Reflection, Imaging systems, Cameras, LIDAR, Laser processing, Laser development, Receivers, Numerical analysis

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Proceedings Article | 22 May 2009 Paper

Paper

Automated nanoscale AFM measurements using a-priori-knowledge

C. Recknagel, H. Rothe

Proc. SPIE. 7378, Scanning Microscopy 2009

KEYWORDS: Image processing algorithms and systems, Metrology, Principal component analysis, Detection and tracking algorithms, Interferometers, Sensors, Image segmentation, Atomic force microscopy, Time metrology, Velocity measurements

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Proceedings Article | 25 September 2008 Paper

Paper

Optical compensation of macroscopical surface curvature in rough surface scatterometry

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 7102, Optical Fabrication, Testing, and Metrology III

KEYWORDS: Diffraction, Mirrors, Modulation, Light scattering, Wavefronts, Receivers, Phase shift keying, Scatterometry, Spherical lenses, Surface finishing

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Proceedings Article | 29 August 2008 Paper

Paper

Utilization of the Scheimpflug-principle in scatterometer design

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 7065, Reflection, Scattering, and Diffraction from Surfaces

KEYWORDS: Optical imaging, Optical components, Diffraction, Mirrors, Imaging systems, Sensors, Imaging devices, Scatterometry, Geometrical optics, Spherical lenses

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Proceedings Article | 29 August 2008 Paper

Paper

Rough surface scatterometry of bodies with rotational symmetry

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 7065, Reflection, Scattering, and Diffraction from Surfaces

KEYWORDS: Diffraction, Mirrors, Polishing, Modulation, Scattering, Light scattering, Wavefronts, Phase shift keying, Scatterometry, Surface finishing

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Proceedings Article | 25 April 2008 Paper

Paper

Development features in large-range nanoscale coordinate metrology

Martin Gruhlke, Christian Recknagel, Hendrik Rothe

Proc. SPIE. 6995, Optical Micro- and Nanometrology in Microsystems Technology II

KEYWORDS: Mirrors, Metrology, Interferometers, Cameras, Sensors, Calibration, Atomic force microscopy, Data conversion, Binary data, Laser sintering

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Proceedings Article | 16 April 2008 Paper

Paper

Thermal weapon sights with integrated fire control computers: algorithms and experiences

Hendrik Rothe, Markus Graswald, Rainer Breiter

Proc. SPIE. 6940, Infrared Technology and Applications XXXIV

KEYWORDS: Thermal weapon sights, Weapons, Digital signal processing, Laser range finders, Computing systems, Control systems, Signal processing, Distance measurement, Firearms, Thermal weapon sites

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Proceedings Article | 11 April 2008 Paper

Paper

Modeling, simulation, and evaluation of HE ammunition for counter-RAM systems

Markus Graswald, Hendrik Rothe

Proc. SPIE. 6965, Modeling and Simulation for Military Operations III

KEYWORDS: Radar, Weapons, Rockets, Sensors, Error analysis, Computing systems, Artillery, Electro optical modeling, Systems modeling, Radar sensor technology

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Proceedings Article | 13 September 2007 Paper

Paper

Non-goniometric scatterometry: a review

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 6682, Polarization Science and Remote Sensing III

KEYWORDS: Diffraction, Mirrors, Optical spheres, Polarization, Imaging systems, Cameras, Sensors, Scatterometry, Convolution, Spherical lenses

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Proceedings Article | 10 September 2007 Paper

Paper

Theoretical and experimental investigations of non-goniometric scatterometry

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III

KEYWORDS: Diffraction, Mirrors, Optical spheres, Imaging systems, Cameras, Sensors, Feature extraction, Scatterometry, Convolution, Spherical lenses

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Proceedings Article | 10 September 2007 Paper

Paper

Combining coordinate measurement and nanometrology for large-range nanoscale metrology

Martin Gruhlke, Hendrik Rothe

Proc. SPIE. 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing

KEYWORDS: Mirrors, Metrology, Interferometers, Sensors, Calibration, Image processing, Atomic force microscopy, Atomic force microscope, Scanning probe microscopy, Temperature metrology

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Proceedings Article | 17 February 2007 Paper

Paper

Spectroscopic imaging from 400nm to 1800nm with liquid crystal tunable filters

C. Hahlweg, H. Rothe

Proc. SPIE. 6503, Machine Vision Applications in Industrial Inspection XV

KEYWORDS: Near infrared, Short wave infrared radiation, Optical filters, Imaging systems, Cameras, Spectroscopy, Imaging spectroscopy, Liquid crystals, Tunable filters, Chemical elements

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Proceedings Article | 5 October 2006 Paper

Paper

Hemispherical radiometer for angle resolved measurement of IR scatter and radiation behaviour

C. Hahlweg, H. Rothe

Proc. SPIE. 6396, Electro-Optical Remote Sensing II

KEYWORDS: Infrared imaging, Short wave infrared radiation, Mirrors, Cameras, Sensors, Calibration, Bidirectional reflectance transmission function, Infrared radiation, Radiometry, Scatter measurement

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Proceedings Article | 20 October 2005 Paper

Paper

Design of a full-hemispherical spectro-radiometer with high dynamic range for characterization of surface properties using multispectral BRDF data from VIS to NIR

C. Hahlweg, H. Rothe

Proc. SPIE. 5965, Optical Fabrication, Testing, and Metrology II

KEYWORDS: Mirrors, Light sources, Light emitting diodes, Imaging systems, Cameras, Sensors, Calibration, Reflectivity, Image sensors, Bidirectional reflectance transmission function

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Proceedings Article | 20 October 2005 Paper

Paper

Classification of optical surface properties and material recognition using mutlispectral BRDF data measured with a semihemispherical spectro-radiometer in VIS and NIR

C. Hahlweg, H. Rothe

Proc. SPIE. 5965, Optical Fabrication, Testing, and Metrology II

KEYWORDS: Near infrared, Mirrors, CMOS sensors, Imaging systems, Cameras, Sensors, Data acquisition, Bidirectional reflectance transmission function, Surface properties, Spatial resolution

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Proceedings Article | 19 October 2005 Paper

Paper

Multispectral image classification focusing on transmission paths with limited bandwidth

Christine Groh, Hendrik Rothe

Proc. SPIE. 5982, Image and Signal Processing for Remote Sensing XI

KEYWORDS: Unmanned aerial vehicles, Imaging systems, Cameras, Data transmission, Multispectral imaging, Data acquisition, Data processing, Image classification, Tunable filters, Global system for mobile communications

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Proceedings Article | 14 October 2005 Paper

Paper

Remote online processing of multispectral image data

Christine Groh, Hendrik Rothe

Proc. SPIE. 5964, Detectors and Associated Signal Processing II

KEYWORDS: Unmanned aerial vehicles, Imaging systems, Cameras, Image processing, Data transmission, Multispectral imaging, Data acquisition, Data processing, Image classification, Tunable filters

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Proceedings Article | 31 August 2005 Paper

Paper

Characterization of drop-on-demand printed conductive silver tracks

Hendrik Rothe, Anna Usbeck, Dominik Cibis, Klaus Krueger

Proc. SPIE. 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II

KEYWORDS: Actuators, Interferometers, Particles, Silver, Atomic force microscopy, Printing, Head, 3D metrology, Information technology, Atomic force microscope

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Proceedings Article | 6 December 2004 Paper

Paper

New pixel-oriented simulation for 3D laser radar

Ulrich Schael, Hendrik Rothe

Proc. SPIE. 5612, Electro-Optical and Infrared Systems: Technology and Applications

KEYWORDS: Signal to noise ratio, 3D acquisition, LIDAR, Sensors, Electrons, Reflectivity, Receivers, 3D metrology, Optical simulations, Lawrencium

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Proceedings Article | 15 October 2004 Paper

Paper

Calibration procedures and measurement results of a fast semihemispherical spectroradiometer in VIS and NIR

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 5546, Imaging Spectrometry X

KEYWORDS: Near infrared, Mirrors, Light sources, Light emitting diodes, Sensors, Calibration, Reflectivity, Bidirectional reflectance transmission function, Spatial resolution, Diffraction gratings

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Proceedings Article | 15 October 2004 Paper

Paper

Design of a semihemispherical spectroradiometer for fast acquisition of BRDF libraries in VIS and NIR

Cornelius Hahlweg, Hendrik Rothe

Proc. SPIE. 5546, Imaging Spectrometry X

KEYWORDS: Mirrors, CMOS sensors, Light sources, Light emitting diodes, Sensors, Calibration, Luminescence, Copper, Bidirectional reflectance transmission function, Spatial resolution

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Proceedings Article | 4 November 2003 Paper

Paper

One way to accomplish the advanced requests of nanometrology: the nanometer coordinate measuring machine (NCMM)

Ralph Petersen, Hendrik Rothe

Proc. SPIE. 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies

KEYWORDS: Actuators, Mirrors, Metrology, Interferometers, Sensors, Calibration, Atomic force microscopy, Data acquisition, Head, Scanning probe microscopy

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Proceedings Article | 4 November 2003 Paper

Paper

Localization of sub-100-nm particles on wafers with solid state detector arrays

Thomas Rinder, Hendrik Rothe

Proc. SPIE. 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies

KEYWORDS: Signal to noise ratio, Mirrors, Polarization, Sensors, Particles, Light scattering, Detector arrays, Solids, Semiconducting wafers, Scatter measurement

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Proceedings Article | 16 October 2003 Paper

Paper

Simulation of eye-safe imaging laser radar for advanced range estimation and improved design process using VRML

Ulrich Schael, Hendrik Rothe

Proc. SPIE. 5189, Surface Scattering and Diffraction III

KEYWORDS: Imaging systems, LIDAR, Sensors, Electrons, Reflectivity, Receivers, Optical simulations, Camera shutters, Lawrencium, Laser systems engineering

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Proceedings Article | 16 October 2003 Paper

Paper

Estimation of performance limits of multipole method using parallel computing techniques

Cornelius Hahlweg, Thomas Rinder, Hendrik Rothe

Proc. SPIE. 5189, Surface Scattering and Diffraction III

KEYWORDS: Gold, Modeling, Scattering, Matrices, Particles, Dielectrics, Computing systems, Atomic force microscopy, Software development, Parallel computing

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Proceedings Article | 16 October 2003 Paper

Paper

Development review of an angle-resolved light scatter (ARS) sensor LARISSA

Thomas Rinder, Hendrik Rothe

Proc. SPIE. 5189, Surface Scattering and Diffraction III

KEYWORDS: Mirrors, CMOS sensors, Optical sensors, Sensors, Light scattering, Detector arrays, Bidirectional reflectance transmission function, Solids, Scatter measurement, Autoregressive models

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Proceedings Article | 16 October 2003 Paper

Paper

Deducing light scatter from AFM measurements

Cornelius Hahlweg, Thomas Rinder, Peter Thomsen-Schmidt, C. Groh, Hendrik Rothe

Proc. SPIE. 5189, Surface Scattering and Diffraction III

KEYWORDS: Gold, Diffraction, Scattering, Dielectrics, Light scattering, Atomic force microscopy, Inverse problems, Bidirectional reflectance transmission function, Scatter measurement, Diffraction gratings

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Proceedings Article | 30 May 2003 Paper

Paper

Advanced simulation of eye-safe imaging laser radar for range estimation, system comparison, and design process

Ulrich Schael, Hendrik Rothe

Proc. SPIE. 5144, Optical Measurement Systems for Industrial Inspection III

KEYWORDS: Imaging systems, LIDAR, Sensors, Image processing, Reflectivity, Receivers, Optical simulations, Pulsed laser operation, Lawrencium, Laser systems engineering

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Proceedings Article | 11 November 2002 Paper

Paper

Large AFM scans with a nanometer coordinate measuring machine (NCMM)

Ralph Petersen, Hendrik Rothe, Dorothee Huser

Proc. SPIE. 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components

KEYWORDS: Actuators, Interferometers, Calibration, Data storage, Control systems, Atomic force microscopy, Head, Scanning probe microscopy, Prototyping, Standards development

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Proceedings Article | 11 November 2002 Paper

Paper

Performance limits of ARS sensor based on CMOS photodiode array

Thomas Rinder, Hendrik Rothe

Proc. SPIE. 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components

KEYWORDS: Signal to noise ratio, Mirrors, CMOS sensors, Sensors, Particles, Silicon, Light scattering, Solids, Scatter measurement, Autoregressive models

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Proceedings Article | 22 October 2002 Paper

Paper

Advanced system model for 1574-nm imaging scannerless eye-safe laser radar

Ulrich Schael, Hendrik Rothe

Proc. SPIE. 4780, Surface Scattering and Diffraction for Advanced Metrology II

KEYWORDS: Target detection, Signal to noise ratio, Imaging systems, LIDAR, Sensors, Electrons, Receivers, Pulsed laser operation, Camera shutters, Lawrencium

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Proceedings Article | 22 October 2002 Paper

Paper

Modeling of an ARS sensor system in spatial and time domain

Thomas Rinder, Hendrik Rothe

Proc. SPIE. 4780, Surface Scattering and Diffraction for Advanced Metrology II

KEYWORDS: Mirrors, CMOS sensors, Polarization, Sensors, Light scattering, Optoelectronics, Solids, Diodes, Autoregressive models, Systems modeling

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Proceedings Article | 10 December 2001 Paper

Paper

Measuring the scatter distribution of PSL spheres on Si wafers using a fast calibrated CMOS photodetector array

Thomas Rinder, Hendrik Rothe

Proc. SPIE. 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II

KEYWORDS: Mirrors, Optical spheres, Sensors, Calibration, Particles, Light scattering, Optical testing, Solids, Semiconducting wafers, Scatter measurement

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Proceedings Article | 10 December 2001 Paper

Paper

Recommendations for the metrological calibration of SPMs: a survey on the European SPMet network project

Hendrik Rothe, Guenther Wilkening, Dorothee Hueser

Proc. SPIE. 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II

KEYWORDS: Microscopes, Metrology, Calibration, Scanners, Atomic force microscopy, Scanning probe microscopy, Position sensors, Feedback control, Standards development, Scanning probe microscopes

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Proceedings Article | 23 October 2001 Paper

Paper

Metrological characterization of an ARS sensor based on an elliptical mirror system and a calibrated CMOS photo detector array

Thomas Rinder, Hendrik Rothe

Proc. SPIE. 4447, Surface Scattering and Diffraction for Advanced Metrology

KEYWORDS: Mirrors, CMOS sensors, Scattering, Sensors, Calibration, Particles, Silicon, Light scattering, Scatter measurement, Frame grabbers

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Proceedings Article | 23 October 2001 Paper

Paper

Influence of target surfaces and speckles for eye-safe scannerless imaging laser radar

Ulrich Schael, Hendrik Rothe

Proc. SPIE. 4447, Surface Scattering and Diffraction for Advanced Metrology

KEYWORDS: Target detection, Signal to noise ratio, Imaging systems, Cameras, LIDAR, Sensors, Receivers, Aluminum, Thin film coatings, Pulsed laser operation

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Proceedings Article | 19 September 2001 Paper

Paper

Field measurements with 1574-nm imaging and scannerless eye-safe laser radar

Ulrich Schael, Hendrik Rothe

Proc. SPIE. 4377, Laser Radar Technology and Applications VI

KEYWORDS: Target detection, Signal to noise ratio, Transmitters, Imaging systems, Cameras, LIDAR, Sensors, Receivers, Pulsed laser operation, Radar imaging

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Proceedings Article | 26 September 2000 Paper

Paper

Polarized light-scattering measurements of polished and etched steel surfaces

Thomas Germer, Thomas Rinder, Hendrik Rothe

Proc. SPIE. 4100, Scattering and Surface Roughness III

KEYWORDS: Polishing, Polarization, Spatial frequencies, Scattering, Light scattering, Atomic force microscopy, Rayleigh scattering, Scatter measurement, Surface finishing, Dielectric polarization

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Proceedings Article | 26 September 2000 Paper

Paper

Development problems of a nanometer coordinate measuring machine (NCMM)

Ralph Petersen, Hendrik Rothe

Proc. SPIE. 4100, Scattering and Surface Roughness III

KEYWORDS: Mathematical modeling, Actuators, Nanotechnology, Microsystems, Control systems, Atomic force microscopy, Head, Scanning probe microscopy, Optimization (mathematics), Optics manufacturing

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Proceedings Article | 26 September 2000 Paper

Paper

AFM data analysis: separating surface microtopography from instrumental artifacts

Dorothee Hueser, Hendrik Rothe

Proc. SPIE. 4100, Scattering and Surface Roughness III

KEYWORDS: Principal component analysis, Linear filtering, Atomic force microscopy, Gaussian filters, Bidirectional reflectance transmission function, Scanning probe microscopy, Surface finishing, Standards development, Information operations, Data analysis

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Proceedings Article | 26 September 2000 Paper

Paper

Design problems of a calibrated BRDF sensor with respect to dynamic range, speed, and large angle of view

Thomas Rinder, Hendrik Rothe, Andre Kasper

Proc. SPIE. 4100, Scattering and Surface Roughness III

KEYWORDS: Mirrors, Spatial frequencies, Sensors, Calibration, Particles, Silicon, Light scattering, Bidirectional reflectance transmission function, Sensor calibration, Autoregressive models

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Proceedings Article | 25 October 1999 Paper

Paper

Characterization of surfaces using neural pattern recognition methods based on BRDF and AFM measurements

Thomas Rinder, Hendrik Rothe

Proc. SPIE. 3784, Rough Surface Scattering and Contamination

KEYWORDS: Principal component analysis, Sensors, Matrices, Pattern recognition, Bidirectional reflectance transmission function, Neural networks, Aluminum, Chlorine, Autoregressive models, Neurons

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Proceedings Article | 25 October 1999 Paper

Paper

Derivation of BRDF data from smooth surface topography of large AFM scans: investigation of the influences of surface figures and AFM artifacts

Hendrik Rothe, Dorothee Hueser, Andre Kasper, Thomas Rinder

Proc. SPIE. 3784, Rough Surface Scattering and Contamination

KEYWORDS: Polishing, Spatial frequencies, Sensors, Light scattering, Atomic force microscopy, Optical testing, Bidirectional reflectance transmission function, Spatial resolution, Stray light, Surface finishing

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Proceedings Article | 29 March 1999 Paper

Paper

Investigations of smooth surfaces by measuring the BRDF with a stray light sensor in comparison with PSD curves evaluated from topography of large AFM scans

Hendrik Rothe, Dorothee Hueser, Andre Kasper, Thomas Rinder

Proc. SPIE. 3619, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays

KEYWORDS: Polishing, Scattering, Sensors, Calibration, Light scattering, Atomic force microscopy, Optical testing, Bidirectional reflectance transmission function, Stray light, Surface finishing

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Proceedings Article | 30 October 1998 Paper

Paper

Comparison of PSD measurements using stray light sensors with PSD curves evaluated from topography of large AFM scans

Dorothee Hueser, Thomas Rinder, Hendrik Rothe

Proc. SPIE. 3426, Scattering and Surface Roughness II

KEYWORDS: Spatial frequencies, Scattering, Sensors, Light scattering, Atomic force microscopy, Optical testing, Bidirectional reflectance transmission function, Rayleigh scattering, Specular reflections, Stray light

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Proceedings Article | 30 October 1998 Paper

Paper

Evaluation of in-situ ARS sensors for characterizing smooth and rough surfaces

Andre Kasper, Hendrik Rothe

Proc. SPIE. 3426, Scattering and Surface Roughness II

KEYWORDS: Polishing, Sensors, Calibration, Light scattering, Reflectivity, Photodiodes, Fiber optics sensors, Bidirectional reflectance transmission function, Autoregressive models, Surface finishing

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Proceedings Article | 8 September 1998 Paper

Paper

Comparison of imaging laser radars based on range gating under different weather conditions

Arno von der Fecht, Hendrik Rothe

Proc. SPIE. 3380, Laser Radar Technology and Applications III

KEYWORDS: Imaging systems, Cameras, LIDAR, Sensors, Video, Microchannel plates, Quantum efficiency, Radar imaging, Camera shutters, Visibility

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Proceedings Article | 1 April 1998 Paper

Paper

Statistical process control by employing circular and spherical statistics for the interpretation of BRDF measurements

Hendrik Rothe, Dorothee Hueser, Andre Kasper

Proc. SPIE. 3275, Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II

KEYWORDS: Statistical analysis, Data modeling, Sensors, Calibration, Bidirectional reflectance transmission function, Process control, Stray light, Spherical lenses, Sensor calibration, Statistical inference

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Proceedings Article | 14 October 1997 Paper

Paper

Statistical estimators of spatial vector fields in defect classification and texture modeling of high-tech surfaces

Hendrik Rothe, Dorothee Hueser

Proc. SPIE. 3167, Statistical and Stochastic Methods in Image Processing II

KEYWORDS: Statistical analysis, Defect detection, Data acquisition, Bidirectional reflectance transmission function, Image classification, Flat panel displays, Stray light, Spherical lenses, Semiconducting wafers, Statistical modeling

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Proceedings Article | 26 September 1997 Paper

Paper

Application of circular and spherical statistics for the interpretation of BRDF measurements

Hendrik Rothe, Dorothee Hueser

Proc. SPIE. 3141, Scattering and Surface Roughness

KEYWORDS: Statistical analysis, Data modeling, Scattering, Sensors, Copper, Silicon, Bidirectional reflectance transmission function, Aluminum, Stray light, Spherical lenses

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Proceedings Article | 6 August 1997 Paper

Paper

Imaging laser radar simulation software and experiments for enhanced and synthetic vision system design

Arno von der Fecht, Hendrik Rothe

Proc. SPIE. 3065, Laser Radar Technology and Applications II

KEYWORDS: Signal to noise ratio, Imaging systems, Cameras, LIDAR, Sensors, Microchannel plates, Interference (communication), Optical simulations, Radar imaging, Laser systems engineering

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Proceedings Article | 4 November 1996 Paper

Paper

Fast and accurate roughness characterization techniques for wafers and hard disks

Hendrik Rothe, Andre Kasper

Proc. SPIE. 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays

KEYWORDS: Laser sources, Fiber optics, Sensors, Atomic force microscopy, Fiber optics sensors, Optical inspection, Head, Semiconducting wafers, Optics manufacturing, Standards development

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Proceedings Article | 23 August 1996 Paper

Paper

Desktop setup for binary holograms

Olaf Ginter, Hendrik Rothe

Proc. SPIE. 2774, Design and Engineering of Optical Systems

KEYWORDS: Light sources, Holograms, Holography, Modulation, Photography, Interferometry, Control systems, Semiconductor lasers, Photomasks, Binary data

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Proceedings Article | 1 September 1995 Paper

Paper

Is there any significant correlation between roughness and scattering near the Rayleigh limit?

Hendrik Rothe, Andre Kasper

Proc. SPIE. 2541, Optical Scattering in the Optics, Semiconductor, and Computer Disk Industries

KEYWORDS: Statistical analysis, Fiber optics, Scattering, Sensors, Light scattering, Fiber optics sensors, Optical testing, Bidirectional reflectance transmission function, Rayleigh scattering, Stray light

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Proceedings Article | 7 October 1994 Paper

Paper

Bidirectional reflectance distribution function (BRDF) sensing with fiber optics, programmable laser diodes, and high-resolution CCD arrays

Hendrik Rothe, Andre Kasper, Peter Riedel, Oliver Specht, Walter Mueller

Proc. SPIE. 2260, Stray Radiation in Optical Systems III

KEYWORDS: Optical sensing, Fiber optics, Sensors, Fiber optics sensors, Semiconductor lasers, CCD cameras, Head, Bidirectional reflectance transmission function, Charge-coupled devices, CCD image sensors

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Proceedings Article | 30 September 1994 Paper

Paper

Principal surface approach as means of precise RMS-roughness estimation in noncontact profilometry

Hendrik Rothe, Angela Duparre, Andre Kasper

Proc. SPIE. 2263, Current Developments in Optical Design and Optical Engineering IV

KEYWORDS: Mirrors, Diamond, Polishing, Metrology, Statistical analysis, Silica, Atomic force microscopy, Photomicroscopy, Surface finishing, Standards development

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Proceedings Article | 23 September 1994 Paper

Paper

Principal-component filtering of single-shot laser radar signals

Hendrik Rothe, Olaf Ginter, Andre Kasper

Proc. SPIE. 2271, Industrial Applications of Laser Radar

KEYWORDS: Optical filters, Speckle, LIDAR, Sensors, Interference (communication), Adaptive optics, Signal processing, Electronic filtering, Filtering (signal processing), Ranging

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SPIE Journal Paper | 1 September 1994

Generic detrending of surface profiles

Hendrik Rothe, Angela Duparre, Stefan Jakobs

OE Vol. 33 Issue 09

KEYWORDS: Atomic force microscopy, Stochastic processes, Light scattering, Digital filtering, Surface finishing, Statistical analysis, Mirrors, Silica, Metrology, Standards development

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Proceedings Article | 17 December 1993 Paper

Paper

Real-time defect detection using multiaperture fiber optic sensors and machine learning

Hendrik Rothe, Angela Duparre, Peter Riedel, Monika Timm

Proc. SPIE. 1989, Computer Vision for Industry

KEYWORDS: Principal component analysis, Statistical analysis, Defect detection, Sensors, Glasses, Fiber optics sensors, Computer vision technology, Bidirectional reflectance transmission function, Machine vision, Machine learning

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Proceedings Article | 1 December 1993 Paper

Paper

Real-time detection of surface damage by direct assessment of the BRDF

Hendrik Rothe, Angela Duparre, Horst Truckenbrodt, Monika Timm

Proc. SPIE. 1995, Optical Scattering: Applications, Measurement, and Theory II

KEYWORDS: Statistical analysis, Defect detection, Fiber optic gyroscopes, Scattering, Sensors, Glasses, Error analysis, Bidirectional reflectance transmission function, Signal processing, Surface finishing

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Proceedings Article | 1 January 1993 Paper

Paper

Testing aspherics without rotational symmetry using a Fizeau interferometer with computer-generated holograms

Tilo Pfeifer, Jens Evertz, Rainer Tutsch, Hendrik Rothe

Proc. SPIE. 1781, Specification and Measurement of Optical Systems

KEYWORDS: Diffraction, Mirrors, Holograms, Interferometers, Wavefronts, Optical testing, Computer generated holography, Aspheric lenses, Optics manufacturing, Fizeau interferometers

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Proceedings Article | 1 January 1993 Paper

Paper

Discrimination of surface properties using BRDF-variance estimators as feature variables

Hendrik Rothe, Horst Truckenbrodt

Proc. SPIE. 1781, Specification and Measurement of Optical Systems

KEYWORDS: Signal to noise ratio, Mirrors, Statistical analysis, Defect detection, Sensors, Copper, Optical testing, Bidirectional reflectance transmission function, Solids, Surface properties

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SPIE Journal Paper | 1 July 1992

Improved accuracy in laser triangulation by variance-stabilizing transformations

Hendrik Rothe, Mario Tuerschmann, Peter Mager, Rainer Endter

OE Vol. 31 Issue 07

KEYWORDS: Interference (communication), Speckle, Sensors, Signal processing, Principal component analysis, Signal to noise ratio, Yield improvement, Charge-coupled devices, Laser stabilization, Stochastic processes

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Showing 5 of 95 publications

Conference Committee Involvement (8)

Reflection, Scattering, and Diffraction from Surfaces VI

20 August 2018 | San Diego, California, United States

Reflection, Scattering, and Diffraction from Surfaces III

14 August 2012 | San Diego, California, United States

Reflection, Scattering, and Diffraction from Surfaces II

2 August 2010 | San Diego, California, United States

Reflection, Scattering, and Diffraction from Surfaces

11 August 2008 | San Diego, California, United States

Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III

28 August 2007 | San Diego, California, United States

Showing 5 of 8 Conference Committees

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