Dr. Henrik Sjoeberg
Director at Mycronic AB
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 20 May 2006 Paper
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Phase shifting, Optical lithography, Deep ultraviolet, Calibration, CCD cameras, Spatial light modulators, Photomasks, Image enhancement, Raster graphics, Neodymium

Proceedings Article | 16 June 2005 Paper
Proc. SPIE. 5835, 21st European Mask and Lithography Conference
KEYWORDS: Electron beam lithography, Optical lithography, Deep ultraviolet, Quartz, CCD cameras, Spatial light modulators, Photomasks, Charge-coupled devices, Optical alignment, Overlay metrology

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5721, MOEMS Display and Imaging Systems III
KEYWORDS: Mirrors, Reflection, Cameras, Calibration, CCD cameras, Spatial light modulators, Micromirrors, Photomasks, Optical alignment, Analog electronics

Proceedings Article | 20 August 2004 Paper
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Lithography, Deep ultraviolet, Image processing, Manufacturing, Laser applications, Printing, Spatial light modulators, Solids, Photomasks, Raster graphics

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Coherence imaging, Electron beams, Electronics, Deep ultraviolet, Particles, Laser applications, Spatial light modulators, Photomasks, Excimer lasers, Optical proximity correction

Showing 5 of 15 publications
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