Dr. Herbert L. Engstrom
President at Tabor Enterprises
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 1 May 1994 Paper
Proc. SPIE. 2196, Integrated Circuit Metrology, Inspection, and Process Control VIII
KEYWORDS: Thin films, Optical lithography, Manufacturing, Photoresist materials, Semiconductor manufacturing, Deposition processes, Spectrophotometry, Semiconducting wafers, Systems modeling, Thin film manufacturing

Proceedings Article | 1 June 1992 Paper
Proc. SPIE. 1673, Integrated Circuit Metrology, Inspection, and Process Control VI
KEYWORDS: Refractive index, Metrology, Titanium, Reflection, Metals, Inspection, Reflectivity, Aluminum, Integrated circuits, Semiconducting wafers

Proceedings Article | 1 July 1991 Paper
Proc. SPIE. 1464, Integrated Circuit Metrology, Inspection, and Process Control V
KEYWORDS: Thin films, Refractive index, Visible radiation, Ultraviolet radiation, Crystals, Silicon, Reflectivity, Reflectometry, Silicon films, Semiconducting wafers

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