Prof. Herbert J. Freimuth
at Institut für Mikrotechnik Mainz GmbH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 January 2006 Paper
Herbert Freimuth, Frithjof von Germar, Ines Frese, Elzbieta Nahrstedt, Michael Küpper, Rainer Schenk, Björn Baser, Johannes Ott, Klaus Drese, Peter Detemple, Theodor Doll
Proceedings Volume 6112, 611203 (2006) https://doi.org/10.1117/12.648003
KEYWORDS: Electrodes, Chemical analysis, Absorption, Lab on a chip, Copper, Statistical analysis, Contamination, Light scattering, Luminescence, Scattering

Proceedings Article | 23 September 1996 Paper
Lutz Weber, Wolfgang Ehrfeld, Herbert Freimuth, Manfred Lacher, Heinz Lehr, Bernhard Pech
Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251203
KEYWORDS: Polymers, Ceramics, Fabrication, Optical components, Surface roughness, Laser ablation, Crystals, Lithography, Connectors, Waveguides

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