Prof. Herbert Barry Harrison
Dean at Griffith Univ
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 29 December 2005 Paper
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Semiconductors, Electronics, Patents, Silicon, Optoelectronic devices, Transistors, Epitaxy, Silicon carbide, Semiconducting wafers, Microtechnology

Proceedings Article | 2 April 2004 Paper
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Oxides, Titanium, Etching, Sputter deposition, Metals, Nickel, Silicon, Photomasks, Wet etching, Thermal oxidation

Proceedings Article | 30 March 2004 Paper
Proc. SPIE. 5274, Microelectronics: Design, Technology, and Packaging
KEYWORDS: Packaging, Semiconductors, Oxides, Switching, Capacitors, Silicon, Transistors, Field effect transistors, Silicon carbide

Proceedings Article | 21 March 2001 Paper
Proc. SPIE. 4235, Smart Structures and Devices
KEYWORDS: Thin films, Electrodes, Dielectrics, Silicon, Resistance, Platinum, Capacitance, Micromachining, Dielectric spectroscopy, Radium

Proceedings Article | 12 November 1999 Paper
Proc. SPIE. 3896, Design, Fabrication, and Characterization of Photonic Devices
KEYWORDS: Fabrication, Wafer-level optics, Optical fibers, Polishing, Waveguides, Etching, Silicon, Wet etching, Optical alignment, Semiconducting wafers

Showing 5 of 15 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 21 November 2001

SPIE Conference Volume | 24 October 2000

Conference Committee Involvement (7)
Microelectronics: Design, Technology, and Packaging III
5 December 2007 | Canberra, ACT, Australia
Microelectronics: Design, Technology, and Packaging II
12 December 2005 | Brisbane, Australia
Smart Structures, Devices, and Systems II
13 December 2004 | Sydney, Australia
Microelectronics: Design, Technology, and Packaging
10 December 2003 | Perth, Australia
Device and Process Technologies for MEMS and Microelectronics II
17 December 2001 | Adelaide, Australia
Showing 5 of 7 Conference Committees
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