Prof. Herbert R. Shea
Professor at Ecole Polytechnique Federale de Lausanne
SPIE Involvement:
Conference Co-Chair | Editor | Author | Instructor
Area of Expertise:
Dielectric Elastomer Actuator , Stretchable electrodes , MEMS reliability , MEMS for Space
Websites:
Publications (62)

Proceedings Article | 24 April 2020 Presentation
Proc. SPIE. 11375, Electroactive Polymer Actuators and Devices (EAPAD) XXII
KEYWORDS: Actuators, Molecules, Solid state lasers, Robots, Buildings, Biology, Blood circulation, Solid state physics, Fluid dynamics, Liquids

Proceedings Article | 22 April 2020 Presentation
Proc. SPIE. 11375, Electroactive Polymer Actuators and Devices (EAPAD) XXII
KEYWORDS: Actuators, Microfluidics, Dielectrics, Oxygen, Parallel computing, Plasma treatment, Laser bonding

Proceedings Article | 22 April 2020 Presentation
Proc. SPIE. 11375, Electroactive Polymer Actuators and Devices (EAPAD) XXII
KEYWORDS: Dielectric elastomer actuators, Shape memory polymers, Instrument modeling

Proceedings Article | 22 April 2020 Presentation
Proc. SPIE. 11375, Electroactive Polymer Actuators and Devices (EAPAD) XXII
KEYWORDS: Carbon, Dielectric elastomer actuators, Electrodes, Composites, Silicon, Humidity, Silicon carbide

Proceedings Article | 13 March 2019 Paper
Proc. SPIE. 10966, Electroactive Polymer Actuators and Devices (EAPAD) XXI
KEYWORDS: Actuators, Dielectric elastomer actuators, Sensors, Electrodes, Power supplies, Capacitance

Showing 5 of 62 publications
Proceedings Volume Editor (4)

Conference Committee Involvement (11)
Electroactive Polymer Actuators and Devices (EAPAD) XXIII
8 March 2021 | Long Beach, California, United States
Electroactive Polymer Actuators and Devices (EAPAD) XXII
27 April 2020 | Online Only, California, United States
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
3 February 2014 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
4 February 2013 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
23 January 2012 | San Francisco, California, United States
Showing 5 of 11 Conference Committees
Course Instructor
SC434: Designing MEMS for Reliability
This course will provide attendees with a basic working knowledge of how to design MEMS for reliability. The course will concentrate on MEMS design, reliability physics, MEMS-specific fundamental reliability phenomena and failure modes, and accelerated testing protocols. Practical and useful examples from various arenas of MEMS application will be provided.
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