Dr. Herman H. P. Th. Bekman
Senior scientist
SPIE Involvement:
Conference Program Committee | Author
Publications (18)

Proceedings Article | 13 November 2024 Presentation
Görsel Yetik, Herman Bekman, Jacqueline van Veldhoven, Shriparna Mukherjee, Karima Tabakkouht, Henk Lensen
Proceedings Volume PC13215, PC132150F (2024) https://doi.org/10.1117/12.3034549
KEYWORDS: Hydrogen, Extreme ultraviolet, Vacuum, Photons, Extreme ultraviolet lithography, X-ray photoelectron spectroscopy, Thin films, Scanning electron microscopy, Pellicles, Reticles

Proceedings Article | 10 April 2024 Presentation
Proceedings Volume PC12953, PC129530I (2024) https://doi.org/10.1117/12.3010105
KEYWORDS: Hydrogen, Extreme ultraviolet, Vacuum, Photons, Pellicles, Extreme ultraviolet lithography, X-ray photoelectron spectroscopy, Thin films, Scanning electron microscopy, Chemical analysis

Proceedings Article | 26 September 2019 Paper
Proceedings Volume 11147, 1114706 (2019) https://doi.org/10.1117/12.2536531
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Photomasks, Pellicles, Temperature metrology, Mirrors, Contamination, Ruthenium

Proceedings Article | 27 June 2019 Open Access Paper
Chien-Ching Wu, Markus Bender, Rik Jonckheere, Frank Scholze, Herman Bekman, Michel van Putten, Rory de Zanger, Rob Ebeling, Jeroen Westerhout, Kyri Nicolai, Jacqueline van Veldhoven, Véronique de Rooij-Lohmann, Olaf Kievit, Alex Deutz
Proceedings Volume 11178, 111780E (2019) https://doi.org/10.1117/12.2537734
KEYWORDS: Extreme ultraviolet lithography, Photomasks, Extreme ultraviolet, Scanners, Reflectivity, Oxidation, Ruthenium

Proceedings Article | 19 March 2018 Paper
Chien-Ching Wu, Edwin te Sligte, Herman Bekman, Arnold Storm, Michel van Putten, Maurice P.M. Limpens, Jacqueline van Veldhoven, Alex Deutz
Proceedings Volume 10583, 1058310 (2018) https://doi.org/10.1117/12.2297369
KEYWORDS: Extreme ultraviolet lithography, Extreme ultraviolet, Photomasks, Pellicles, Scanners, EUV optics, High volume manufacturing

Showing 5 of 18 publications
Conference Committee Involvement (4)
International Conference on Extreme Ultraviolet Lithography 2024
30 September 2024 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2023
2 October 2023 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2022
26 September 2022 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2021
27 September 2021 | Online Only, United States
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