Dr. Herman H. P. Th. Bekman
Researcher at TNO
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11147, International Conference on Extreme Ultraviolet Lithography 2019
KEYWORDS: Mirrors, Contamination, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Temperature metrology

Proceedings Article | 27 June 2019 Paper
Proc. SPIE. 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Scanners, Reflectivity, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Oxidation

Proceedings Article | 19 March 2018 Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Scanners, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, High volume manufacturing, EUV optics

Proceedings Article | 27 April 2009 Paper
Proc. SPIE. 7334, Algorithms and Technologies for Multispectral, Hyperspectral, and Ultraspectral Imagery XV
KEYWORDS: Target detection, Hyperspectral imaging, Detection and tracking algorithms, Sensors, Image processing, Distance measurement, Algorithm development, Hyperspectral target detection, Mahalanobis distance, 3D image processing

Proceedings Article | 7 October 2008 Paper
Proc. SPIE. 7112, Unmanned/Unattended Sensors and Sensor Networks V
KEYWORDS: Target detection, Radar, Infrared cameras, Infrared sensors, Infrared imaging, Detection and tracking algorithms, Cameras, Sensors, Sensor networks, Unattended ground sensors

Showing 5 of 16 publications
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