Dr. Hermann Schenk
at Fraunhofer Institute for Photonic Microsystems
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 February 2020 Paper
Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX
KEYWORDS: Microelectromechanical systems, Actuators, Capacitors, Silicon, Complex systems, Solids, Differential equations, Finite element methods, Acoustics

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