Hesham A. Diab
TME at Mentor Graphics Egypt
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 1 October 2009
JM3 Vol. 8 Issue 04
KEYWORDS: Metrology, Fractal analysis, Point spread functions, Extreme ultraviolet lithography, Extreme ultraviolet, Deep ultraviolet, Calibration, Scanning electron microscopy, Visualization, Convolution

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Logic, Visualization, Metals, Manufacturing, Photomasks, Shape analysis, Double patterning technology, Optical proximity correction, Resolution enhancement technologies

Proceedings Article | 21 March 2007 Paper
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Oscillators, Visualization, Etching, Silicon, Design for manufacturing, Transistors, Semiconducting wafers, Integrated circuit design, Process modeling

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