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Hideki Shimizu
Manager at SCREEN Holdings Co Ltd
SPIE Involvement:
Author
Area of Expertise:
Lithography Track , Process development , SOKUDO Co., Ltd. , Coater/Developer , SCREEN Semiconductor solutions Co., Ltd. , Lithography Defectivity improvement & Yield Control
Websites:
Company Website
Publications (1)
Proceedings Article | 27 March 2014 Paper
Wet particle source identification and reduction using a new filter cleaning process
Toru Umeda, Akihiko Morita, Hideki Shimizu, Shuichi Tsuzuki
Proceedings Volume 9051, 90511F (2014) https://doi.org/10.1117/12.2046560
KEYWORDS: Particles, Particle filters, Semiconducting wafers, Lithography, Metrology, Silicon, Inspection, Liquids, Metals, Mass spectrometry
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