Dr. Hielke Schoonewelle Profile

Dr. Hielke Schoonewelle

at ASML

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Publications (2)

Proceedings Article | 30 March 2017 Paper

Computational scanner wafer mark alignment

Boris Menchtchikov, Robert Socha, Sudharshanan Raghunathan, Irina Lyulina, Hielke Schoonewelle, Patrick Tinnemans, Paul Tuffy, Philippe Leray, Christiane Jehoul

Proceedings Volume 10147, 101471C (2017) https://doi.org/10.1117/12.2259750

KEYWORDS: Far infrared, Optical alignment, Semiconducting wafers, Sensors, Signal detection, Avalanche photodetectors, Signal processing, Scanners, Optical lithography, Overlay metrology

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Proceedings Article | 24 March 2016 Paper

Improving scanner wafer alignment performance by target optimization

Philippe Leray, Christiane Jehoul, Robert Socha, Boris Menchtchikov, Sudhar Raghunathan, Eric Kent, Hielke Schoonewelle, Patrick Tinnemans, Paul Tuffy, Jun Belen, Rich Wise

Proceedings Volume 9778, 97782M (2016) https://doi.org/10.1117/12.2219491

KEYWORDS: Optical alignment, Semiconducting wafers, Overlay metrology, Scanners, Etching, Avalanche photodetectors, Optical lithography, Silicon, Metrology, Chemical mechanical planarization

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