Dr. Hikaru Sugita Profile

Dr. Hikaru Sugita

at JSR Engineering Co Ltd

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Author

Publications (2)

Proceedings Article | 30 March 2007 Paper

Novel developers for positive tone EUV photoresists

Geeta Sharma, Shalini Sharma, Michael Rattner, Robert Meagley, Masato Tanaka, Tsutomu Shimokawa, Hikaru Sugita, Tina Wang, Atsushi Shiota

Proceedings Volume 6519, 65190P (2007) https://doi.org/10.1117/12.712377

KEYWORDS: Standards development, Photoresist developing, Photoresist materials, Extreme ultraviolet lithography, Photoresist processing, Extreme ultraviolet, Polymers, Scanning electron microscopy, Semiconducting wafers, Solids

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Proceedings Article | 4 May 2005 Paper

Comparison of single-, bi-, and tri-layer resist process

Isao Nishimura, Hiroyuki Ishii, Norihiko Sugie, Naka-atsu Yoshimura, Masato Tanaka, Hiromi Egawa, Keiji Konno, Makoto Sugiura, Hikaru Sugita, Junichi Takahashi, Tsutomu Shimokawa

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.598367

KEYWORDS: Etching, Photoresist processing, Line width roughness, Lithography, Reflectivity, Photoresist materials, Line edge roughness, Silicon, Photomasks, Surface roughness

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