Prof. Hiroaki Kawata Profile

Prof. Hiroaki Kawata

Professor at Osaka Metropolitan Univ

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Author

Publications (7)

Proceedings Article | 10 May 2016 Paper

Resist behaviour during peeling release in nano-imprint lithography

Florian Chalvin, Naoto Nakamura, Takamitsu Tochino, Masaaki Yasuda, Hiroaki Kawata, Yoshihiko Hirai

Proceedings Volume 9984, 99840K (2016) https://doi.org/10.1117/12.2240298

KEYWORDS: Lithography, Nanoimprint lithography, Neodymium, Transmission electron microscopy, Polymethylmethacrylate, Computer simulations, Silicon, Photoresist processing, Finite element methods, Mechanics

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Proceedings Article | 28 July 2014 Paper

Built-in lens mask lithography: challenge for high definition lens-less lithography

Naoki Ueda, Masaru Sasago, Akio Misaka, Hisao Kikuta, Hiroaki Kawata, Yoshihiko Hirai

Proceedings Volume 9256, 92560A (2014) https://doi.org/10.1117/12.2065251

KEYWORDS: Photomasks, Lithography, Transmittance, Resolution enhancement technologies, Binary data, Geometrical optics, Numerical simulations, Light wave propagation, Collimation, Phase shifts

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Proceedings Article | 31 March 2014 Paper

Built-in lens mask lithography

Naoki Ueda, Masaru Sasago, Akio Misaka, Hisao Kikuta, Hiroaki Kawata, Yoshihiko Hirai

Proceedings Volume 9052, 90520I (2014) https://doi.org/10.1117/12.2046060

KEYWORDS: Photomasks, Lithography, Transmittance, Resolution enhancement technologies, Binary data, Geometrical optics, Optical lithography, Phase shifts, Light wave propagation, Collimation

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Proceedings Article | 27 May 2009 Paper

Molecular dynamics study on mold fracture by nanoscale defects in nanoimprint lithography

K. Tada, M. Yasuda, N. Fujii, H. Kawata, Y. Hirai

Proceedings Volume 7470, 747012 (2009) https://doi.org/10.1117/12.835201

KEYWORDS: Silicon, Nanoimprint lithography, Crystals, Motion models, Dry etching, Crystallography, Photomicroscopy, Nanolithography, Mask making, Electron beams

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Proceedings Article | 3 May 2007 Paper

Hybrid nanoimprint for micro-nano mixture structure

Keisuke Okuda, Naoyuki Niimi, Hiroaki Kawata, Yoshihiko Hirai

Proceedings Volume 6533, 65330R (2007) https://doi.org/10.1117/12.736928

KEYWORDS: Nanoimprint lithography, Ultraviolet radiation, Lithography, Nickel, Photoresist processing, Quartz, Chromium, Dry etching, Optical lithography, Polymers

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Proceedings Article | 31 August 2006 Paper

Reproduction of anti-reflection structures by nano casting method

Yoshihiko Hirai, Kenji Sogo, Masaki Nakajima, Hiroaki Kawata

Proceedings Volume 6327, 63270Y (2006) https://doi.org/10.1117/12.680683

KEYWORDS: Ultraviolet radiation, Polymers, Polymethylmethacrylate, Quartz, Nanoimprint lithography, Printing, Coating, Thin film coatings, Scanning electron microscopy, Yield improvement

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Proceedings Article | 8 October 2004 Paper

High-aspect ratio grating fabrication by imprint lithography

Yoshihiko Hirai, Takaaki Konishi, Tomohiro Kanakugi, Hiroaki Kawata, Hisao Kikuta

Proceedings Volume 5515, (2004) https://doi.org/10.1117/12.560249

KEYWORDS: Polymers, Nanoimprint lithography, Lithography, Optical components, Glasses, Electron beam lithography, Wave plates, Silicon, Polymethylmethacrylate, Optical switching

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Showing 5 of 7 publications

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